5/3/2011	10:16:33 AM	Run aborted at 10:16 AM
5/3/2011	10:16:33 AM	Helium valve closed
5/3/2011	10:16:33 AM	H2 valve closed
5/3/2011	10:16:33 AM	BCl3 valve closed
5/3/2011	10:16:33 AM	PH3 valve closed
5/3/2011	10:16:33 AM	SiCl4 pre valve closed
5/3/2011	10:16:33 AM	SiCl4 post valve closed
5/3/2011	10:16:33 AM	Bypass valve closed
5/3/2011	10:16:33 AM	Main Vac valve closed
5/3/2011	10:16:33 AM	Bubbler valve closed
5/3/2011	10:16:33 AM	Helium MFC set to  0.000000
5/3/2011	10:16:33 AM	H2 MFC set to  0.000000
5/3/2011	10:16:33 AM	BCl3 MFC set to  0.000000
5/3/2011	10:16:33 AM	PHl3 MFC set to  0.000000
5/3/2011	10:16:33 AM	SiCl4 MFC set to  0.000000
5/3/2011	10:16:33 AM	Tube furnace set to 0
5/3/2011	10:56:48 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/3/2011	10:56:48 AM	Recipe started at 10:56 AM
5/3/2011	10:56:48 AM	Helium valve closed
5/3/2011	10:56:48 AM	H2 valve closed
5/3/2011	10:56:48 AM	BCl3 valve closed
5/3/2011	10:56:48 AM	PH3 valve closed
5/3/2011	10:56:48 AM	SiCl4 pre valve closed
5/3/2011	10:56:48 AM	SiCl4 post valve closed
5/3/2011	10:56:48 AM	Main Vac valve closed
5/3/2011	10:56:48 AM	Bubbler valve closed
5/3/2011	10:56:48 AM	Bypass valve opened
5/3/2011	10:56:48 AM	Helium MFC set to  0.000000
5/3/2011	10:56:48 AM	H2 MFC set to  0.000000
5/3/2011	10:56:48 AM	BCl3 MFC set to  0.000000
5/3/2011	10:56:48 AM	PHl3 MFC set to  0.000000
5/3/2011	10:56:48 AM	SiCl4 MFC set to  0.000000
5/3/2011	10:56:48 AM	Bypass solenoid MFC set to  0.000000
5/3/2011	10:56:49 AM	Tube furnace set to 0
5/3/2011	10:57:22 AM	Helium valve closed
5/3/2011	10:57:22 AM	H2 valve closed
5/3/2011	10:57:22 AM	BCl3 valve closed
5/3/2011	10:57:22 AM	PH3 valve closed
5/3/2011	10:57:22 AM	SiCl4 pre valve closed
5/3/2011	10:57:22 AM	SiCl4 post valve closed
5/3/2011	10:57:22 AM	Bubbler valve closed
5/3/2011	10:57:22 AM	Main Vac valve opened
5/3/2011	10:57:22 AM	Bypass valve opened
5/3/2011	10:57:22 AM	Helium MFC set to  0.000000
5/3/2011	10:57:22 AM	H2 MFC set to  0.000000
5/3/2011	10:57:22 AM	BCl3 MFC set to  0.000000
5/3/2011	10:57:22 AM	PHl3 MFC set to  0.000000
5/3/2011	10:57:22 AM	SiCl4 MFC set to  0.000000
5/3/2011	10:57:22 AM	Bypass solenoid MFC set to  0.000000
5/3/2011	10:57:23 AM	Tube furnace set to 0
5/3/2011	10:57:23 AM	Run finished at 10:57 AM
5/3/2011	10:57:23 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/3/2011	11:03:58 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/3/2011	11:03:59 AM	Recipe started at 11:03 AM
5/3/2011	11:03:59 AM	H2 valve closed
5/3/2011	11:03:59 AM	BCl3 valve closed
5/3/2011	11:03:59 AM	PH3 valve closed
5/3/2011	11:03:59 AM	SiCl4 pre valve closed
5/3/2011	11:03:59 AM	SiCl4 post valve closed
5/3/2011	11:03:59 AM	Main Vac valve closed
5/3/2011	11:03:59 AM	Bypass valve closed
5/3/2011	11:03:59 AM	Bubbler valve closed
5/3/2011	11:03:59 AM	Helium valve opened
5/3/2011	11:03:59 AM	Helium MFC set to  500.000000
5/3/2011	11:03:59 AM	H2 MFC set to  0.000000
5/3/2011	11:03:59 AM	BCl3 MFC set to  0.000000
5/3/2011	11:03:59 AM	PHl3 MFC set to  0.000000
5/3/2011	11:03:59 AM	SiCl4 MFC set to  0.000000
5/3/2011	11:03:59 AM	Bypass solenoid MFC set to  0.000000
5/3/2011	11:03:59 AM	Tube furnace set to 0
5/3/2011	11:05:20 AM	Helium valve closed
5/3/2011	11:05:20 AM	H2 valve closed
5/3/2011	11:05:20 AM	BCl3 valve closed
5/3/2011	11:05:20 AM	PH3 valve closed
5/3/2011	11:05:20 AM	SiCl4 pre valve closed
5/3/2011	11:05:20 AM	SiCl4 post valve closed
5/3/2011	11:05:20 AM	Main Vac valve closed
5/3/2011	11:05:20 AM	Bypass valve closed
5/3/2011	11:05:20 AM	Bubbler valve closed
5/3/2011	11:05:20 AM	Helium MFC set to  0.000000
5/3/2011	11:05:20 AM	H2 MFC set to  0.000000
5/3/2011	11:05:20 AM	BCl3 MFC set to  0.000000
5/3/2011	11:05:20 AM	PHl3 MFC set to  0.000000
5/3/2011	11:05:20 AM	SiCl4 MFC set to  0.000000
5/3/2011	11:05:20 AM	Bypass solenoid MFC set to  0.000000
5/3/2011	11:05:20 AM	Tube furnace set to 0
5/3/2011	11:05:20 AM	Run finished at 11:05 AM
5/3/2011	11:05:20 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/3/2011	11:08:14 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/3/2011	11:08:14 AM	Recipe started at 11:08 AM
5/3/2011	11:08:14 AM	Helium valve closed
5/3/2011	11:08:14 AM	H2 valve closed
5/3/2011	11:08:14 AM	BCl3 valve closed
5/3/2011	11:08:14 AM	PH3 valve closed
5/3/2011	11:08:14 AM	SiCl4 pre valve closed
5/3/2011	11:08:14 AM	SiCl4 post valve closed
5/3/2011	11:08:14 AM	Main Vac valve closed
5/3/2011	11:08:14 AM	Bubbler valve closed
5/3/2011	11:08:14 AM	Bypass valve opened
5/3/2011	11:08:14 AM	Helium MFC set to  0.000000
5/3/2011	11:08:14 AM	H2 MFC set to  0.000000
5/3/2011	11:08:14 AM	BCl3 MFC set to  0.000000
5/3/2011	11:08:14 AM	PHl3 MFC set to  0.000000
5/3/2011	11:08:14 AM	SiCl4 MFC set to  0.000000
5/3/2011	11:08:14 AM	Bypass solenoid MFC set to  0.000000
5/3/2011	11:08:15 AM	Tube furnace set to 0
5/3/2011	11:08:47 AM	Helium valve closed
5/3/2011	11:08:47 AM	H2 valve closed
5/3/2011	11:08:47 AM	BCl3 valve closed
5/3/2011	11:08:47 AM	PH3 valve closed
5/3/2011	11:08:47 AM	SiCl4 pre valve closed
5/3/2011	11:08:47 AM	SiCl4 post valve closed
5/3/2011	11:08:47 AM	Bubbler valve closed
5/3/2011	11:08:47 AM	Main Vac valve opened
5/3/2011	11:08:47 AM	Bypass valve opened
5/3/2011	11:08:47 AM	Helium MFC set to  0.000000
5/3/2011	11:08:47 AM	H2 MFC set to  0.000000
5/3/2011	11:08:47 AM	BCl3 MFC set to  0.000000
5/3/2011	11:08:47 AM	PHl3 MFC set to  0.000000
5/3/2011	11:08:47 AM	SiCl4 MFC set to  0.000000
5/3/2011	11:08:47 AM	Bypass solenoid MFC set to  0.000000
5/3/2011	11:08:47 AM	Tube furnace set to 0
5/3/2011	11:08:47 AM	Run finished at 11:08 AM
5/3/2011	11:08:47 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/3/2011	11:09:21 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
5/3/2011	11:09:33 AM	Recipe started at 11:09 AM
5/3/2011	11:09:33 AM	Helium valve closed
5/3/2011	11:09:33 AM	H2 valve closed
5/3/2011	11:09:33 AM	BCl3 valve closed
5/3/2011	11:09:33 AM	PH3 valve closed
5/3/2011	11:09:33 AM	SiCl4 pre valve closed
5/3/2011	11:09:33 AM	SiCl4 post valve closed
5/3/2011	11:09:33 AM	Main Vac valve closed
5/3/2011	11:09:33 AM	Bubbler valve closed
5/3/2011	11:09:33 AM	Bypass valve opened
5/3/2011	11:09:33 AM	Helium MFC set to  0.000000
5/3/2011	11:09:33 AM	H2 MFC set to  0.000000
5/3/2011	11:09:33 AM	BCl3 MFC set to  0.000000
5/3/2011	11:09:33 AM	PHl3 MFC set to  0.000000
5/3/2011	11:09:33 AM	SiCl4 MFC set to  0.000000
5/3/2011	11:09:33 AM	Bypass solenoid MFC set to  0.000000
5/3/2011	11:09:33 AM	Tube furnace set to 0
5/3/2011	11:09:34 AM	Helium valve closed
5/3/2011	11:09:34 AM	H2 valve closed
5/3/2011	11:09:34 AM	BCl3 valve closed
5/3/2011	11:09:34 AM	PH3 valve closed
5/3/2011	11:09:34 AM	SiCl4 pre valve closed
5/3/2011	11:09:34 AM	SiCl4 post valve closed
5/3/2011	11:09:34 AM	Bubbler valve closed
5/3/2011	11:09:34 AM	Main Vac valve opened
5/3/2011	11:09:34 AM	Bypass valve opened
5/3/2011	11:09:34 AM	Helium MFC set to  0.000000
5/3/2011	11:09:34 AM	H2 MFC set to  0.000000
5/3/2011	11:09:34 AM	BCl3 MFC set to  0.000000
5/3/2011	11:09:34 AM	PHl3 MFC set to  0.000000
5/3/2011	11:09:34 AM	SiCl4 MFC set to  0.000000
5/3/2011	11:09:34 AM	Bypass solenoid MFC set to  0.000000
5/3/2011	11:09:34 AM	Tube furnace set to 0
5/3/2011	11:10:34 AM	H2 valve closed
5/3/2011	11:10:34 AM	BCl3 valve closed
5/3/2011	11:10:34 AM	PH3 valve closed
5/3/2011	11:10:34 AM	SiCl4 pre valve closed
5/3/2011	11:10:34 AM	SiCl4 post valve closed
5/3/2011	11:10:34 AM	Bubbler valve closed
5/3/2011	11:10:34 AM	Helium valve opened
5/3/2011	11:10:34 AM	Main Vac valve opened
5/3/2011	11:10:34 AM	Bypass valve opened
5/3/2011	11:10:34 AM	Helium MFC set to  100.000000
5/3/2011	11:10:34 AM	H2 MFC set to  0.000000
5/3/2011	11:10:34 AM	BCl3 MFC set to  0.000000
5/3/2011	11:10:34 AM	PHl3 MFC set to  0.000000
5/3/2011	11:10:34 AM	SiCl4 MFC set to  0.000000
5/3/2011	11:10:34 AM	Bypass solenoid MFC set to  0.000000
5/3/2011	11:10:34 AM	Tube furnace set to 0
5/3/2011	11:11:34 AM	Helium valve closed
5/3/2011	11:11:34 AM	H2 valve closed
5/3/2011	11:11:34 AM	BCl3 valve closed
5/3/2011	11:11:34 AM	PH3 valve closed
5/3/2011	11:11:34 AM	SiCl4 pre valve closed
5/3/2011	11:11:34 AM	SiCl4 post valve closed
5/3/2011	11:11:34 AM	Bubbler valve closed
5/3/2011	11:11:34 AM	Main Vac valve opened
5/3/2011	11:11:34 AM	Bypass valve opened
5/3/2011	11:11:34 AM	Helium MFC set to  0.000000
5/3/2011	11:11:34 AM	H2 MFC set to  0.000000
5/3/2011	11:11:34 AM	BCl3 MFC set to  0.000000
5/3/2011	11:11:34 AM	PHl3 MFC set to  0.000000
5/3/2011	11:11:34 AM	SiCl4 MFC set to  0.000000
5/3/2011	11:11:34 AM	Bypass solenoid MFC set to  0.000000
5/3/2011	11:11:34 AM	Tube furnace set to 0
5/3/2011	11:12:34 AM	H2 valve closed
5/3/2011	11:12:34 AM	BCl3 valve closed
5/3/2011	11:12:34 AM	PH3 valve closed
5/3/2011	11:12:34 AM	SiCl4 pre valve closed
5/3/2011	11:12:34 AM	SiCl4 post valve closed
5/3/2011	11:12:34 AM	Bubbler valve closed
5/3/2011	11:12:34 AM	Helium valve opened
5/3/2011	11:12:34 AM	Main Vac valve opened
5/3/2011	11:12:34 AM	Bypass valve opened
5/3/2011	11:12:34 AM	Helium MFC set to  100.000000
5/3/2011	11:12:34 AM	H2 MFC set to  0.000000
5/3/2011	11:12:34 AM	BCl3 MFC set to  0.000000
5/3/2011	11:12:34 AM	PHl3 MFC set to  0.000000
5/3/2011	11:12:34 AM	SiCl4 MFC set to  0.000000
5/3/2011	11:12:34 AM	Bypass solenoid MFC set to  0.000000
5/3/2011	11:12:34 AM	Tube furnace set to 0
5/3/2011	11:13:34 AM	Helium valve closed
5/3/2011	11:13:34 AM	H2 valve closed
5/3/2011	11:13:34 AM	BCl3 valve closed
5/3/2011	11:13:34 AM	PH3 valve closed
5/3/2011	11:13:34 AM	SiCl4 pre valve closed
5/3/2011	11:13:34 AM	SiCl4 post valve closed
5/3/2011	11:13:34 AM	Bubbler valve closed
5/3/2011	11:13:34 AM	Main Vac valve opened
5/3/2011	11:13:34 AM	Bypass valve opened
5/3/2011	11:13:34 AM	Helium MFC set to  0.000000
5/3/2011	11:13:34 AM	H2 MFC set to  0.000000
5/3/2011	11:13:34 AM	BCl3 MFC set to  0.000000
5/3/2011	11:13:34 AM	PHl3 MFC set to  0.000000
5/3/2011	11:13:34 AM	SiCl4 MFC set to  0.000000
5/3/2011	11:13:34 AM	Bypass solenoid MFC set to  0.000000
5/3/2011	11:13:35 AM	Tube furnace set to 0
5/3/2011	11:14:35 AM	H2 valve closed
5/3/2011	11:14:35 AM	BCl3 valve closed
5/3/2011	11:14:35 AM	PH3 valve closed
5/3/2011	11:14:35 AM	SiCl4 pre valve closed
5/3/2011	11:14:35 AM	SiCl4 post valve closed
5/3/2011	11:14:35 AM	Bubbler valve closed
5/3/2011	11:14:35 AM	Helium valve opened
5/3/2011	11:14:35 AM	Main Vac valve opened
5/3/2011	11:14:35 AM	Bypass valve opened
5/3/2011	11:14:35 AM	Helium MFC set to  100.000000
5/3/2011	11:14:35 AM	H2 MFC set to  0.000000
5/3/2011	11:14:35 AM	BCl3 MFC set to  0.000000
5/3/2011	11:14:35 AM	PHl3 MFC set to  0.000000
5/3/2011	11:14:35 AM	SiCl4 MFC set to  0.000000
5/3/2011	11:14:35 AM	Bypass solenoid MFC set to  0.000000
5/3/2011	11:14:35 AM	Tube furnace set to 0
5/3/2011	11:15:35 AM	Helium valve closed
5/3/2011	11:15:35 AM	H2 valve closed
5/3/2011	11:15:35 AM	BCl3 valve closed
5/3/2011	11:15:35 AM	PH3 valve closed
5/3/2011	11:15:35 AM	SiCl4 pre valve closed
5/3/2011	11:15:35 AM	SiCl4 post valve closed
5/3/2011	11:15:35 AM	Bubbler valve closed
5/3/2011	11:15:35 AM	Main Vac valve opened
5/3/2011	11:15:35 AM	Bypass valve opened
5/3/2011	11:15:35 AM	Helium MFC set to  0.000000
5/3/2011	11:15:35 AM	H2 MFC set to  0.000000
5/3/2011	11:15:35 AM	BCl3 MFC set to  0.000000
5/3/2011	11:15:35 AM	PHl3 MFC set to  0.000000
5/3/2011	11:15:35 AM	SiCl4 MFC set to  0.000000
5/3/2011	11:15:35 AM	Bypass solenoid MFC set to  0.000000
5/3/2011	11:15:35 AM	Tube furnace set to 0
5/3/2011	11:16:35 AM	H2 valve closed
5/3/2011	11:16:35 AM	BCl3 valve closed
5/3/2011	11:16:35 AM	PH3 valve closed
5/3/2011	11:16:35 AM	SiCl4 pre valve closed
5/3/2011	11:16:35 AM	SiCl4 post valve closed
5/3/2011	11:16:35 AM	Bubbler valve closed
5/3/2011	11:16:35 AM	Helium valve opened
5/3/2011	11:16:35 AM	Main Vac valve opened
5/3/2011	11:16:35 AM	Bypass valve opened
5/3/2011	11:16:35 AM	Helium MFC set to  100.000000
5/3/2011	11:16:35 AM	H2 MFC set to  0.000000
5/3/2011	11:16:35 AM	BCl3 MFC set to  0.000000
5/3/2011	11:16:35 AM	PHl3 MFC set to  0.000000
5/3/2011	11:16:35 AM	SiCl4 MFC set to  0.000000
5/3/2011	11:16:35 AM	Bypass solenoid MFC set to  0.000000
5/3/2011	11:16:35 AM	Tube furnace set to 0
5/3/2011	11:17:35 AM	Helium valve closed
5/3/2011	11:17:35 AM	H2 valve closed
5/3/2011	11:17:35 AM	BCl3 valve closed
5/3/2011	11:17:35 AM	PH3 valve closed
5/3/2011	11:17:35 AM	SiCl4 pre valve closed
5/3/2011	11:17:35 AM	SiCl4 post valve closed
5/3/2011	11:17:35 AM	Bubbler valve closed
5/3/2011	11:17:35 AM	Main Vac valve opened
5/3/2011	11:17:35 AM	Bypass valve opened
5/3/2011	11:17:35 AM	Helium MFC set to  0.000000
5/3/2011	11:17:35 AM	H2 MFC set to  0.000000
5/3/2011	11:17:35 AM	BCl3 MFC set to  0.000000
5/3/2011	11:17:35 AM	PHl3 MFC set to  0.000000
5/3/2011	11:17:35 AM	SiCl4 MFC set to  0.000000
5/3/2011	11:17:35 AM	Bypass solenoid MFC set to  0.000000
5/3/2011	11:17:35 AM	Tube furnace set to 0
5/3/2011	11:18:35 AM	H2 valve closed
5/3/2011	11:18:35 AM	BCl3 valve closed
5/3/2011	11:18:35 AM	PH3 valve closed
5/3/2011	11:18:35 AM	SiCl4 pre valve closed
5/3/2011	11:18:35 AM	SiCl4 post valve closed
5/3/2011	11:18:35 AM	Bubbler valve closed
5/3/2011	11:18:35 AM	Helium valve opened
5/3/2011	11:18:35 AM	Main Vac valve opened
5/3/2011	11:18:35 AM	Bypass valve opened
5/3/2011	11:18:35 AM	Helium MFC set to  100.000000
5/3/2011	11:18:35 AM	H2 MFC set to  0.000000
5/3/2011	11:18:35 AM	BCl3 MFC set to  0.000000
5/3/2011	11:18:35 AM	PHl3 MFC set to  0.000000
5/3/2011	11:18:35 AM	SiCl4 MFC set to  0.000000
5/3/2011	11:18:35 AM	Bypass solenoid MFC set to  0.000000
5/3/2011	11:18:36 AM	Tube furnace set to 0
5/3/2011	11:19:36 AM	Helium valve closed
5/3/2011	11:19:36 AM	H2 valve closed
5/3/2011	11:19:36 AM	BCl3 valve closed
5/3/2011	11:19:36 AM	PH3 valve closed
5/3/2011	11:19:36 AM	SiCl4 pre valve closed
5/3/2011	11:19:36 AM	SiCl4 post valve closed
5/3/2011	11:19:36 AM	Bubbler valve closed
5/3/2011	11:19:36 AM	Main Vac valve opened
5/3/2011	11:19:36 AM	Bypass valve opened
5/3/2011	11:19:36 AM	Helium MFC set to  0.000000
5/3/2011	11:19:36 AM	H2 MFC set to  0.000000
5/3/2011	11:19:36 AM	BCl3 MFC set to  0.000000
5/3/2011	11:19:36 AM	PHl3 MFC set to  0.000000
5/3/2011	11:19:36 AM	SiCl4 MFC set to  0.000000
5/3/2011	11:19:36 AM	Bypass solenoid MFC set to  0.000000
5/3/2011	11:19:36 AM	Tube furnace set to 0
5/3/2011	11:20:36 AM	H2 valve closed
5/3/2011	11:20:36 AM	BCl3 valve closed
5/3/2011	11:20:36 AM	PH3 valve closed
5/3/2011	11:20:36 AM	SiCl4 pre valve closed
5/3/2011	11:20:36 AM	SiCl4 post valve closed
5/3/2011	11:20:36 AM	Bubbler valve closed
5/3/2011	11:20:36 AM	Helium valve opened
5/3/2011	11:20:36 AM	Main Vac valve opened
5/3/2011	11:20:36 AM	Bypass valve opened
5/3/2011	11:20:36 AM	Helium MFC set to  100.000000
5/3/2011	11:20:36 AM	H2 MFC set to  0.000000
5/3/2011	11:20:36 AM	BCl3 MFC set to  0.000000
5/3/2011	11:20:36 AM	PHl3 MFC set to  0.000000
5/3/2011	11:20:36 AM	SiCl4 MFC set to  0.000000
5/3/2011	11:20:36 AM	Bypass solenoid MFC set to  0.000000
5/3/2011	11:20:36 AM	Tube furnace set to 0
5/3/2011	11:21:36 AM	Helium valve closed
5/3/2011	11:21:36 AM	H2 valve closed
5/3/2011	11:21:36 AM	BCl3 valve closed
5/3/2011	11:21:36 AM	PH3 valve closed
5/3/2011	11:21:36 AM	SiCl4 pre valve closed
5/3/2011	11:21:36 AM	SiCl4 post valve closed
5/3/2011	11:21:36 AM	Bubbler valve closed
5/3/2011	11:21:36 AM	Main Vac valve opened
5/3/2011	11:21:36 AM	Bypass valve opened
5/3/2011	11:21:36 AM	Helium MFC set to  0.000000
5/3/2011	11:21:36 AM	H2 MFC set to  0.000000
5/3/2011	11:21:36 AM	BCl3 MFC set to  0.000000
5/3/2011	11:21:36 AM	PHl3 MFC set to  0.000000
5/3/2011	11:21:36 AM	SiCl4 MFC set to  0.000000
5/3/2011	11:21:36 AM	Bypass solenoid MFC set to  0.000000
5/3/2011	11:21:36 AM	Tube furnace set to 0
5/3/2011	11:22:36 AM	H2 valve closed
5/3/2011	11:22:36 AM	BCl3 valve closed
5/3/2011	11:22:36 AM	PH3 valve closed
5/3/2011	11:22:36 AM	SiCl4 pre valve closed
5/3/2011	11:22:36 AM	SiCl4 post valve closed
5/3/2011	11:22:36 AM	Bubbler valve closed
5/3/2011	11:22:36 AM	Helium valve opened
5/3/2011	11:22:36 AM	Main Vac valve opened
5/3/2011	11:22:36 AM	Bypass valve opened
5/3/2011	11:22:36 AM	Helium MFC set to  100.000000
5/3/2011	11:22:36 AM	H2 MFC set to  0.000000
5/3/2011	11:22:36 AM	BCl3 MFC set to  0.000000
5/3/2011	11:22:36 AM	PHl3 MFC set to  0.000000
5/3/2011	11:22:36 AM	SiCl4 MFC set to  0.000000
5/3/2011	11:22:36 AM	Bypass solenoid MFC set to  0.000000
5/3/2011	11:22:36 AM	Tube furnace set to 0
5/3/2011	11:23:36 AM	Helium valve closed
5/3/2011	11:23:36 AM	H2 valve closed
5/3/2011	11:23:36 AM	BCl3 valve closed
5/3/2011	11:23:36 AM	PH3 valve closed
5/3/2011	11:23:36 AM	SiCl4 pre valve closed
5/3/2011	11:23:36 AM	SiCl4 post valve closed
5/3/2011	11:23:36 AM	Bubbler valve closed
5/3/2011	11:23:36 AM	Main Vac valve opened
5/3/2011	11:23:36 AM	Bypass valve opened
5/3/2011	11:23:36 AM	Helium MFC set to  0.000000
5/3/2011	11:23:36 AM	H2 MFC set to  0.000000
5/3/2011	11:23:36 AM	BCl3 MFC set to  0.000000
5/3/2011	11:23:36 AM	PHl3 MFC set to  0.000000
5/3/2011	11:23:36 AM	SiCl4 MFC set to  0.000000
5/3/2011	11:23:36 AM	Bypass solenoid MFC set to  0.000000
5/3/2011	11:23:37 AM	Tube furnace set to 0
5/3/2011	11:24:37 AM	H2 valve closed
5/3/2011	11:24:37 AM	BCl3 valve closed
5/3/2011	11:24:37 AM	PH3 valve closed
5/3/2011	11:24:37 AM	SiCl4 pre valve closed
5/3/2011	11:24:37 AM	SiCl4 post valve closed
5/3/2011	11:24:37 AM	Bubbler valve closed
5/3/2011	11:24:37 AM	Helium valve opened
5/3/2011	11:24:37 AM	Main Vac valve opened
5/3/2011	11:24:37 AM	Bypass valve opened
5/3/2011	11:24:37 AM	Helium MFC set to  100.000000
5/3/2011	11:24:37 AM	H2 MFC set to  0.000000
5/3/2011	11:24:37 AM	BCl3 MFC set to  0.000000
5/3/2011	11:24:37 AM	PHl3 MFC set to  0.000000
5/3/2011	11:24:37 AM	SiCl4 MFC set to  0.000000
5/3/2011	11:24:37 AM	Bypass solenoid MFC set to  0.000000
5/3/2011	11:24:37 AM	Tube furnace set to 0
5/3/2011	11:25:37 AM	Helium valve closed
5/3/2011	11:25:37 AM	H2 valve closed
5/3/2011	11:25:37 AM	BCl3 valve closed
5/3/2011	11:25:37 AM	PH3 valve closed
5/3/2011	11:25:37 AM	SiCl4 pre valve closed
5/3/2011	11:25:37 AM	SiCl4 post valve closed
5/3/2011	11:25:37 AM	Bubbler valve closed
5/3/2011	11:25:37 AM	Main Vac valve opened
5/3/2011	11:25:37 AM	Bypass valve opened
5/3/2011	11:25:37 AM	Helium MFC set to  0.000000
5/3/2011	11:25:37 AM	H2 MFC set to  0.000000
5/3/2011	11:25:37 AM	BCl3 MFC set to  0.000000
5/3/2011	11:25:37 AM	PHl3 MFC set to  0.000000
5/3/2011	11:25:37 AM	SiCl4 MFC set to  0.000000
5/3/2011	11:25:37 AM	Bypass solenoid MFC set to  0.000000
5/3/2011	11:25:37 AM	Tube furnace set to 0
5/3/2011	11:26:37 AM	H2 valve closed
5/3/2011	11:26:37 AM	BCl3 valve closed
5/3/2011	11:26:37 AM	PH3 valve closed
5/3/2011	11:26:37 AM	SiCl4 pre valve closed
5/3/2011	11:26:37 AM	SiCl4 post valve closed
5/3/2011	11:26:37 AM	Bubbler valve closed
5/3/2011	11:26:37 AM	Helium valve opened
5/3/2011	11:26:37 AM	Main Vac valve opened
5/3/2011	11:26:37 AM	Bypass valve opened
5/3/2011	11:26:37 AM	Helium MFC set to  100.000000
5/3/2011	11:26:37 AM	H2 MFC set to  0.000000
5/3/2011	11:26:37 AM	BCl3 MFC set to  0.000000
5/3/2011	11:26:37 AM	PHl3 MFC set to  0.000000
5/3/2011	11:26:37 AM	SiCl4 MFC set to  0.000000
5/3/2011	11:26:37 AM	Bypass solenoid MFC set to  0.000000
5/3/2011	11:26:37 AM	Tube furnace set to 0
5/3/2011	11:27:37 AM	Helium valve closed
5/3/2011	11:27:37 AM	H2 valve closed
5/3/2011	11:27:37 AM	BCl3 valve closed
5/3/2011	11:27:37 AM	PH3 valve closed
5/3/2011	11:27:37 AM	SiCl4 pre valve closed
5/3/2011	11:27:37 AM	SiCl4 post valve closed
5/3/2011	11:27:37 AM	Bubbler valve closed
5/3/2011	11:27:37 AM	Main Vac valve opened
5/3/2011	11:27:37 AM	Bypass valve opened
5/3/2011	11:27:37 AM	Helium MFC set to  0.000000
5/3/2011	11:27:37 AM	H2 MFC set to  0.000000
5/3/2011	11:27:37 AM	BCl3 MFC set to  0.000000
5/3/2011	11:27:37 AM	PHl3 MFC set to  0.000000
5/3/2011	11:27:37 AM	SiCl4 MFC set to  0.000000
5/3/2011	11:27:37 AM	Bypass solenoid MFC set to  0.000000
5/3/2011	11:27:37 AM	Tube furnace set to 0
5/3/2011	11:28:37 AM	H2 valve closed
5/3/2011	11:28:37 AM	BCl3 valve closed
5/3/2011	11:28:37 AM	PH3 valve closed
5/3/2011	11:28:37 AM	SiCl4 pre valve closed
5/3/2011	11:28:37 AM	SiCl4 post valve closed
5/3/2011	11:28:37 AM	Bubbler valve closed
5/3/2011	11:28:37 AM	Helium valve opened
5/3/2011	11:28:37 AM	Main Vac valve opened
5/3/2011	11:28:37 AM	Bypass valve opened
5/3/2011	11:28:37 AM	Helium MFC set to  100.000000
5/3/2011	11:28:37 AM	H2 MFC set to  0.000000
5/3/2011	11:28:37 AM	BCl3 MFC set to  0.000000
5/3/2011	11:28:37 AM	PHl3 MFC set to  0.000000
5/3/2011	11:28:37 AM	SiCl4 MFC set to  0.000000
5/3/2011	11:28:37 AM	Bypass solenoid MFC set to  0.000000
5/3/2011	11:28:38 AM	Tube furnace set to 0
5/3/2011	11:29:38 AM	Helium valve closed
5/3/2011	11:29:38 AM	H2 valve closed
5/3/2011	11:29:38 AM	BCl3 valve closed
5/3/2011	11:29:38 AM	PH3 valve closed
5/3/2011	11:29:38 AM	SiCl4 pre valve closed
5/3/2011	11:29:38 AM	SiCl4 post valve closed
5/3/2011	11:29:38 AM	Bubbler valve closed
5/3/2011	11:29:38 AM	Main Vac valve opened
5/3/2011	11:29:38 AM	Bypass valve opened
5/3/2011	11:29:38 AM	Helium MFC set to  0.000000
5/3/2011	11:29:38 AM	H2 MFC set to  0.000000
5/3/2011	11:29:38 AM	BCl3 MFC set to  0.000000
5/3/2011	11:29:38 AM	PHl3 MFC set to  0.000000
5/3/2011	11:29:38 AM	SiCl4 MFC set to  0.000000
5/3/2011	11:29:38 AM	Bypass solenoid MFC set to  0.000000
5/3/2011	11:29:38 AM	Tube furnace set to 0
5/3/2011	11:29:39 AM	Run finished at 11:29 AM
5/3/2011	11:29:39 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
5/3/2011	11:46:39 AM	Helium MFC set to  20.000000
5/3/2011	11:46:39 AM	Helium valve opened
5/3/2011	11:58:09 AM	Helium valve closed
5/3/2011	11:58:13 AM	Helium MFC set to  10.000000
5/3/2011	11:58:14 AM	Helium valve opened
5/3/2011	1:32:27 PM	Helium valve closed
5/3/2011	1:33:06 PM	Recipe started at 1:33 PM
5/3/2011	1:33:06 PM	Helium valve closed
5/3/2011	1:33:06 PM	BCl3 valve closed
5/3/2011	1:33:06 PM	PH3 valve closed
5/3/2011	1:33:06 PM	SiCl4 pre valve closed
5/3/2011	1:33:06 PM	SiCl4 post valve closed
5/3/2011	1:33:06 PM	Main Vac valve closed
5/3/2011	1:33:06 PM	Bypass valve closed
5/3/2011	1:33:06 PM	Bubbler valve closed
5/3/2011	1:33:06 PM	H2 valve opened
5/3/2011	1:33:06 PM	Helium MFC set to  0.000000
5/3/2011	1:33:06 PM	H2 MFC set to  500.000000
5/3/2011	1:33:06 PM	BCl3 MFC set to  0.000000
5/3/2011	1:33:06 PM	PHl3 MFC set to  0.000000
5/3/2011	1:33:06 PM	SiCl4 MFC set to  0.000000
5/3/2011	1:33:06 PM	Bypass solenoid MFC set to  0.000000
5/3/2011	1:33:06 PM	Tube furnace set to 0
5/3/2011	1:34:29 PM	Helium valve closed
5/3/2011	1:34:29 PM	BCl3 valve closed
5/3/2011	1:34:29 PM	PH3 valve closed
5/3/2011	1:34:29 PM	SiCl4 pre valve closed
5/3/2011	1:34:29 PM	SiCl4 post valve closed
5/3/2011	1:34:29 PM	Main Vac valve closed
5/3/2011	1:34:29 PM	Bypass valve closed
5/3/2011	1:34:29 PM	H2 valve opened
5/3/2011	1:34:29 PM	Bubbler valve opened
5/3/2011	1:34:29 PM	Helium MFC set to  0.000000
5/3/2011	1:34:29 PM	H2 MFC set to  500.000000
5/3/2011	1:34:29 PM	BCl3 MFC set to  0.000000
5/3/2011	1:34:29 PM	PHl3 MFC set to  0.000000
5/3/2011	1:34:29 PM	SiCl4 MFC set to  0.000000
5/3/2011	1:34:29 PM	Bypass solenoid MFC set to  0.000000
5/3/2011	1:34:29 PM	Tube furnace set to 1000
5/3/2011	1:54:29 PM	Helium valve closed
5/3/2011	1:54:29 PM	BCl3 valve closed
5/3/2011	1:54:29 PM	PH3 valve closed
5/3/2011	1:54:29 PM	Main Vac valve closed
5/3/2011	1:54:29 PM	Bypass valve closed
5/3/2011	1:54:29 PM	H2 valve opened
5/3/2011	1:54:29 PM	SiCl4 pre valve opened
5/3/2011	1:54:29 PM	SiCl4 post valve opened
5/3/2011	1:54:29 PM	Bubbler valve opened
5/3/2011	1:54:29 PM	Helium MFC set to  0.000000
5/3/2011	1:54:29 PM	H2 MFC set to  500.000000
5/3/2011	1:54:29 PM	BCl3 MFC set to  0.000000
5/3/2011	1:54:29 PM	PHl3 MFC set to  0.000000
5/3/2011	1:54:29 PM	SiCl4 MFC set to  50.000000
5/3/2011	1:54:29 PM	Bypass solenoid MFC set to  0.000000
5/3/2011	1:54:29 PM	Tube furnace set to 1000
5/3/2011	2:14:29 PM	Helium valve closed
5/3/2011	2:14:29 PM	BCl3 valve closed
5/3/2011	2:14:29 PM	PH3 valve closed
5/3/2011	2:14:29 PM	SiCl4 pre valve closed
5/3/2011	2:14:29 PM	SiCl4 post valve closed
5/3/2011	2:14:29 PM	Main Vac valve closed
5/3/2011	2:14:29 PM	Bypass valve closed
5/3/2011	2:14:29 PM	H2 valve opened
5/3/2011	2:14:29 PM	Bubbler valve opened
5/3/2011	2:14:29 PM	Helium MFC set to  0.000000
5/3/2011	2:14:29 PM	H2 MFC set to  500.000000
5/3/2011	2:14:29 PM	BCl3 MFC set to  0.000000
5/3/2011	2:14:29 PM	PHl3 MFC set to  0.000000
5/3/2011	2:14:29 PM	SiCl4 MFC set to  0.000000
5/3/2011	2:14:29 PM	Bypass solenoid MFC set to  0.000000
5/3/2011	2:14:30 PM	Tube furnace set to 0
5/3/2011	2:33:27 PM	H2 valve closed
5/3/2011	2:33:27 PM	BCl3 valve closed
5/3/2011	2:33:27 PM	PH3 valve closed
5/3/2011	2:33:27 PM	SiCl4 pre valve closed
5/3/2011	2:33:27 PM	SiCl4 post valve closed
5/3/2011	2:33:27 PM	Main Vac valve closed
5/3/2011	2:33:27 PM	Bypass valve closed
5/3/2011	2:33:27 PM	Helium valve opened
5/3/2011	2:33:27 PM	Bubbler valve opened
5/3/2011	2:33:27 PM	Helium MFC set to  500.000000
5/3/2011	2:33:27 PM	H2 MFC set to  0.000000
5/3/2011	2:33:27 PM	BCl3 MFC set to  0.000000
5/3/2011	2:33:27 PM	PHl3 MFC set to  0.000000
5/3/2011	2:33:27 PM	SiCl4 MFC set to  0.000000
5/3/2011	2:33:27 PM	Bypass solenoid MFC set to  0.000000
5/3/2011	2:33:27 PM	Tube furnace set to 0
5/3/2011	2:34:52 PM	Helium valve closed
5/3/2011	2:34:52 PM	H2 valve closed
5/3/2011	2:34:52 PM	BCl3 valve closed
5/3/2011	2:34:52 PM	PH3 valve closed
5/3/2011	2:34:52 PM	SiCl4 pre valve closed
5/3/2011	2:34:52 PM	SiCl4 post valve closed
5/3/2011	2:34:52 PM	Main Vac valve closed
5/3/2011	2:34:52 PM	Bypass valve closed
5/3/2011	2:34:52 PM	Bubbler valve closed
5/3/2011	2:34:52 PM	Helium MFC set to  0.000000
5/3/2011	2:34:52 PM	H2 MFC set to  0.000000
5/3/2011	2:34:52 PM	BCl3 MFC set to  0.000000
5/3/2011	2:34:52 PM	PHl3 MFC set to  0.000000
5/3/2011	2:34:52 PM	SiCl4 MFC set to  0.000000
5/3/2011	2:34:52 PM	Bypass solenoid MFC set to  0.000000
5/3/2011	2:34:52 PM	Tube furnace set to 0
5/3/2011	2:34:52 PM	Run finished at 2:34 PM
5/3/2011	2:46:21 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/3/2011	2:46:21 PM	Recipe started at 2:46 PM
5/3/2011	2:46:21 PM	Helium valve closed
5/3/2011	2:46:21 PM	H2 valve closed
5/3/2011	2:46:21 PM	BCl3 valve closed
5/3/2011	2:46:21 PM	PH3 valve closed
5/3/2011	2:46:21 PM	SiCl4 pre valve closed
5/3/2011	2:46:21 PM	SiCl4 post valve closed
5/3/2011	2:46:21 PM	Main Vac valve closed
5/3/2011	2:46:21 PM	Bubbler valve closed
5/3/2011	2:46:21 PM	Bypass valve opened
5/3/2011	2:46:21 PM	Helium MFC set to  0.000000
5/3/2011	2:46:21 PM	H2 MFC set to  0.000000
5/3/2011	2:46:21 PM	BCl3 MFC set to  0.000000
5/3/2011	2:46:21 PM	PHl3 MFC set to  0.000000
5/3/2011	2:46:21 PM	SiCl4 MFC set to  0.000000
5/3/2011	2:46:21 PM	Bypass solenoid MFC set to  0.000000
5/3/2011	2:46:21 PM	Tube furnace set to 0
5/3/2011	2:46:55 PM	Helium valve closed
5/3/2011	2:46:55 PM	H2 valve closed
5/3/2011	2:46:55 PM	BCl3 valve closed
5/3/2011	2:46:55 PM	PH3 valve closed
5/3/2011	2:46:55 PM	SiCl4 pre valve closed
5/3/2011	2:46:55 PM	SiCl4 post valve closed
5/3/2011	2:46:55 PM	Bubbler valve closed
5/3/2011	2:46:55 PM	Main Vac valve opened
5/3/2011	2:46:55 PM	Bypass valve opened
5/3/2011	2:46:55 PM	Helium MFC set to  0.000000
5/3/2011	2:46:55 PM	H2 MFC set to  0.000000
5/3/2011	2:46:55 PM	BCl3 MFC set to  0.000000
5/3/2011	2:46:55 PM	PHl3 MFC set to  0.000000
5/3/2011	2:46:55 PM	SiCl4 MFC set to  0.000000
5/3/2011	2:46:55 PM	Bypass solenoid MFC set to  0.000000
5/3/2011	2:46:55 PM	Tube furnace set to 0
5/3/2011	2:46:55 PM	Run finished at 2:46 PM
5/3/2011	2:46:55 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/3/2011	2:47:00 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
5/3/2011	2:47:12 PM	Recipe started at 2:47 PM
5/3/2011	2:47:12 PM	Helium valve closed
5/3/2011	2:47:12 PM	H2 valve closed
5/3/2011	2:47:12 PM	BCl3 valve closed
5/3/2011	2:47:12 PM	PH3 valve closed
5/3/2011	2:47:12 PM	SiCl4 pre valve closed
5/3/2011	2:47:12 PM	SiCl4 post valve closed
5/3/2011	2:47:12 PM	Main Vac valve closed
5/3/2011	2:47:12 PM	Bubbler valve closed
5/3/2011	2:47:12 PM	Bypass valve opened
5/3/2011	2:47:12 PM	Helium MFC set to  0.000000
5/3/2011	2:47:12 PM	H2 MFC set to  0.000000
5/3/2011	2:47:12 PM	BCl3 MFC set to  0.000000
5/3/2011	2:47:12 PM	PHl3 MFC set to  0.000000
5/3/2011	2:47:12 PM	SiCl4 MFC set to  0.000000
5/3/2011	2:47:12 PM	Bypass solenoid MFC set to  0.000000
5/3/2011	2:47:12 PM	Tube furnace set to 0
5/3/2011	2:47:12 PM	Helium valve closed
5/3/2011	2:47:12 PM	H2 valve closed
5/3/2011	2:47:12 PM	BCl3 valve closed
5/3/2011	2:47:12 PM	PH3 valve closed
5/3/2011	2:47:12 PM	SiCl4 pre valve closed
5/3/2011	2:47:12 PM	SiCl4 post valve closed
5/3/2011	2:47:12 PM	Bubbler valve closed
5/3/2011	2:47:12 PM	Main Vac valve opened
5/3/2011	2:47:12 PM	Bypass valve opened
5/3/2011	2:47:12 PM	Helium MFC set to  0.000000
5/3/2011	2:47:12 PM	H2 MFC set to  0.000000
5/3/2011	2:47:12 PM	BCl3 MFC set to  0.000000
5/3/2011	2:47:12 PM	PHl3 MFC set to  0.000000
5/3/2011	2:47:12 PM	SiCl4 MFC set to  0.000000
5/3/2011	2:47:12 PM	Bypass solenoid MFC set to  0.000000
5/3/2011	2:47:13 PM	Tube furnace set to 0
5/3/2011	2:48:13 PM	H2 valve closed
5/3/2011	2:48:13 PM	BCl3 valve closed
5/3/2011	2:48:13 PM	PH3 valve closed
5/3/2011	2:48:13 PM	SiCl4 pre valve closed
5/3/2011	2:48:13 PM	SiCl4 post valve closed
5/3/2011	2:48:13 PM	Bubbler valve closed
5/3/2011	2:48:13 PM	Helium valve opened
5/3/2011	2:48:13 PM	Main Vac valve opened
5/3/2011	2:48:13 PM	Bypass valve opened
5/3/2011	2:48:13 PM	Helium MFC set to  100.000000
5/3/2011	2:48:13 PM	H2 MFC set to  0.000000
5/3/2011	2:48:13 PM	BCl3 MFC set to  0.000000
5/3/2011	2:48:13 PM	PHl3 MFC set to  0.000000
5/3/2011	2:48:13 PM	SiCl4 MFC set to  0.000000
5/3/2011	2:48:13 PM	Bypass solenoid MFC set to  0.000000
5/3/2011	2:48:13 PM	Tube furnace set to 0
5/3/2011	2:49:13 PM	Helium valve closed
5/3/2011	2:49:13 PM	H2 valve closed
5/3/2011	2:49:13 PM	BCl3 valve closed
5/3/2011	2:49:13 PM	PH3 valve closed
5/3/2011	2:49:13 PM	SiCl4 pre valve closed
5/3/2011	2:49:13 PM	SiCl4 post valve closed
5/3/2011	2:49:13 PM	Bubbler valve closed
5/3/2011	2:49:13 PM	Main Vac valve opened
5/3/2011	2:49:13 PM	Bypass valve opened
5/3/2011	2:49:13 PM	Helium MFC set to  0.000000
5/3/2011	2:49:13 PM	H2 MFC set to  0.000000
5/3/2011	2:49:13 PM	BCl3 MFC set to  0.000000
5/3/2011	2:49:13 PM	PHl3 MFC set to  0.000000
5/3/2011	2:49:13 PM	SiCl4 MFC set to  0.000000
5/3/2011	2:49:13 PM	Bypass solenoid MFC set to  0.000000
5/3/2011	2:49:13 PM	Tube furnace set to 0
5/3/2011	2:50:13 PM	H2 valve closed
5/3/2011	2:50:13 PM	BCl3 valve closed
5/3/2011	2:50:13 PM	PH3 valve closed
5/3/2011	2:50:13 PM	SiCl4 pre valve closed
5/3/2011	2:50:13 PM	SiCl4 post valve closed
5/3/2011	2:50:13 PM	Bubbler valve closed
5/3/2011	2:50:13 PM	Helium valve opened
5/3/2011	2:50:13 PM	Main Vac valve opened
5/3/2011	2:50:13 PM	Bypass valve opened
5/3/2011	2:50:13 PM	Helium MFC set to  100.000000
5/3/2011	2:50:13 PM	H2 MFC set to  0.000000
5/3/2011	2:50:13 PM	BCl3 MFC set to  0.000000
5/3/2011	2:50:13 PM	PHl3 MFC set to  0.000000
5/3/2011	2:50:13 PM	SiCl4 MFC set to  0.000000
5/3/2011	2:50:13 PM	Bypass solenoid MFC set to  0.000000
5/3/2011	2:50:13 PM	Tube furnace set to 0
5/3/2011	2:51:13 PM	Helium valve closed
5/3/2011	2:51:13 PM	H2 valve closed
5/3/2011	2:51:13 PM	BCl3 valve closed
5/3/2011	2:51:13 PM	PH3 valve closed
5/3/2011	2:51:13 PM	SiCl4 pre valve closed
5/3/2011	2:51:13 PM	SiCl4 post valve closed
5/3/2011	2:51:13 PM	Bubbler valve closed
5/3/2011	2:51:13 PM	Main Vac valve opened
5/3/2011	2:51:13 PM	Bypass valve opened
5/3/2011	2:51:13 PM	Helium MFC set to  0.000000
5/3/2011	2:51:13 PM	H2 MFC set to  0.000000
5/3/2011	2:51:13 PM	BCl3 MFC set to  0.000000
5/3/2011	2:51:13 PM	PHl3 MFC set to  0.000000
5/3/2011	2:51:13 PM	SiCl4 MFC set to  0.000000
5/3/2011	2:51:13 PM	Bypass solenoid MFC set to  0.000000
5/3/2011	2:51:13 PM	Tube furnace set to 0
5/3/2011	2:52:13 PM	H2 valve closed
5/3/2011	2:52:13 PM	BCl3 valve closed
5/3/2011	2:52:13 PM	PH3 valve closed
5/3/2011	2:52:13 PM	SiCl4 pre valve closed
5/3/2011	2:52:13 PM	SiCl4 post valve closed
5/3/2011	2:52:13 PM	Bubbler valve closed
5/3/2011	2:52:13 PM	Helium valve opened
5/3/2011	2:52:13 PM	Main Vac valve opened
5/3/2011	2:52:13 PM	Bypass valve opened
5/3/2011	2:52:13 PM	Helium MFC set to  100.000000
5/3/2011	2:52:13 PM	H2 MFC set to  0.000000
5/3/2011	2:52:13 PM	BCl3 MFC set to  0.000000
5/3/2011	2:52:13 PM	PHl3 MFC set to  0.000000
5/3/2011	2:52:13 PM	SiCl4 MFC set to  0.000000
5/3/2011	2:52:13 PM	Bypass solenoid MFC set to  0.000000
5/3/2011	2:52:14 PM	Tube furnace set to 0
5/3/2011	2:53:14 PM	Helium valve closed
5/3/2011	2:53:14 PM	H2 valve closed
5/3/2011	2:53:14 PM	BCl3 valve closed
5/3/2011	2:53:14 PM	PH3 valve closed
5/3/2011	2:53:14 PM	SiCl4 pre valve closed
5/3/2011	2:53:14 PM	SiCl4 post valve closed
5/3/2011	2:53:14 PM	Bubbler valve closed
5/3/2011	2:53:14 PM	Main Vac valve opened
5/3/2011	2:53:14 PM	Bypass valve opened
5/3/2011	2:53:14 PM	Helium MFC set to  0.000000
5/3/2011	2:53:14 PM	H2 MFC set to  0.000000
5/3/2011	2:53:14 PM	BCl3 MFC set to  0.000000
5/3/2011	2:53:14 PM	PHl3 MFC set to  0.000000
5/3/2011	2:53:14 PM	SiCl4 MFC set to  0.000000
5/3/2011	2:53:14 PM	Bypass solenoid MFC set to  0.000000
5/3/2011	2:53:14 PM	Tube furnace set to 0
5/3/2011	2:54:14 PM	H2 valve closed
5/3/2011	2:54:14 PM	BCl3 valve closed
5/3/2011	2:54:14 PM	PH3 valve closed
5/3/2011	2:54:14 PM	SiCl4 pre valve closed
5/3/2011	2:54:14 PM	SiCl4 post valve closed
5/3/2011	2:54:14 PM	Bubbler valve closed
5/3/2011	2:54:14 PM	Helium valve opened
5/3/2011	2:54:14 PM	Main Vac valve opened
5/3/2011	2:54:14 PM	Bypass valve opened
5/3/2011	2:54:14 PM	Helium MFC set to  100.000000
5/3/2011	2:54:14 PM	H2 MFC set to  0.000000
5/3/2011	2:54:14 PM	BCl3 MFC set to  0.000000
5/3/2011	2:54:14 PM	PHl3 MFC set to  0.000000
5/3/2011	2:54:14 PM	SiCl4 MFC set to  0.000000
5/3/2011	2:54:14 PM	Bypass solenoid MFC set to  0.000000
5/3/2011	2:54:14 PM	Tube furnace set to 0
5/3/2011	2:55:14 PM	Helium valve closed
5/3/2011	2:55:14 PM	H2 valve closed
5/3/2011	2:55:14 PM	BCl3 valve closed
5/3/2011	2:55:14 PM	PH3 valve closed
5/3/2011	2:55:14 PM	SiCl4 pre valve closed
5/3/2011	2:55:14 PM	SiCl4 post valve closed
5/3/2011	2:55:14 PM	Bubbler valve closed
5/3/2011	2:55:14 PM	Main Vac valve opened
5/3/2011	2:55:14 PM	Bypass valve opened
5/3/2011	2:55:14 PM	Helium MFC set to  0.000000
5/3/2011	2:55:14 PM	H2 MFC set to  0.000000
5/3/2011	2:55:14 PM	BCl3 MFC set to  0.000000
5/3/2011	2:55:14 PM	PHl3 MFC set to  0.000000
5/3/2011	2:55:14 PM	SiCl4 MFC set to  0.000000
5/3/2011	2:55:14 PM	Bypass solenoid MFC set to  0.000000
5/3/2011	2:55:14 PM	Tube furnace set to 0
5/3/2011	2:56:14 PM	H2 valve closed
5/3/2011	2:56:14 PM	BCl3 valve closed
5/3/2011	2:56:14 PM	PH3 valve closed
5/3/2011	2:56:14 PM	SiCl4 pre valve closed
5/3/2011	2:56:14 PM	SiCl4 post valve closed
5/3/2011	2:56:14 PM	Bubbler valve closed
5/3/2011	2:56:14 PM	Helium valve opened
5/3/2011	2:56:14 PM	Main Vac valve opened
5/3/2011	2:56:14 PM	Bypass valve opened
5/3/2011	2:56:14 PM	Helium MFC set to  100.000000
5/3/2011	2:56:14 PM	H2 MFC set to  0.000000
5/3/2011	2:56:14 PM	BCl3 MFC set to  0.000000
5/3/2011	2:56:14 PM	PHl3 MFC set to  0.000000
5/3/2011	2:56:14 PM	SiCl4 MFC set to  0.000000
5/3/2011	2:56:14 PM	Bypass solenoid MFC set to  0.000000
5/3/2011	2:56:14 PM	Tube furnace set to 0
5/3/2011	2:57:14 PM	Helium valve closed
5/3/2011	2:57:14 PM	H2 valve closed
5/3/2011	2:57:14 PM	BCl3 valve closed
5/3/2011	2:57:14 PM	PH3 valve closed
5/3/2011	2:57:14 PM	SiCl4 pre valve closed
5/3/2011	2:57:14 PM	SiCl4 post valve closed
5/3/2011	2:57:14 PM	Bubbler valve closed
5/3/2011	2:57:14 PM	Main Vac valve opened
5/3/2011	2:57:14 PM	Bypass valve opened
5/3/2011	2:57:14 PM	Helium MFC set to  0.000000
5/3/2011	2:57:14 PM	H2 MFC set to  0.000000
5/3/2011	2:57:14 PM	BCl3 MFC set to  0.000000
5/3/2011	2:57:14 PM	PHl3 MFC set to  0.000000
5/3/2011	2:57:14 PM	SiCl4 MFC set to  0.000000
5/3/2011	2:57:14 PM	Bypass solenoid MFC set to  0.000000
5/3/2011	2:57:15 PM	Tube furnace set to 0
5/3/2011	2:58:15 PM	H2 valve closed
5/3/2011	2:58:15 PM	BCl3 valve closed
5/3/2011	2:58:15 PM	PH3 valve closed
5/3/2011	2:58:15 PM	SiCl4 pre valve closed
5/3/2011	2:58:15 PM	SiCl4 post valve closed
5/3/2011	2:58:15 PM	Bubbler valve closed
5/3/2011	2:58:15 PM	Helium valve opened
5/3/2011	2:58:15 PM	Main Vac valve opened
5/3/2011	2:58:15 PM	Bypass valve opened
5/3/2011	2:58:15 PM	Helium MFC set to  100.000000
5/3/2011	2:58:15 PM	H2 MFC set to  0.000000
5/3/2011	2:58:15 PM	BCl3 MFC set to  0.000000
5/3/2011	2:58:15 PM	PHl3 MFC set to  0.000000
5/3/2011	2:58:15 PM	SiCl4 MFC set to  0.000000
5/3/2011	2:58:15 PM	Bypass solenoid MFC set to  0.000000
5/3/2011	2:58:15 PM	Tube furnace set to 0
5/3/2011	2:59:15 PM	Helium valve closed
5/3/2011	2:59:15 PM	H2 valve closed
5/3/2011	2:59:15 PM	BCl3 valve closed
5/3/2011	2:59:15 PM	PH3 valve closed
5/3/2011	2:59:15 PM	SiCl4 pre valve closed
5/3/2011	2:59:15 PM	SiCl4 post valve closed
5/3/2011	2:59:15 PM	Bubbler valve closed
5/3/2011	2:59:15 PM	Main Vac valve opened
5/3/2011	2:59:15 PM	Bypass valve opened
5/3/2011	2:59:15 PM	Helium MFC set to  0.000000
5/3/2011	2:59:15 PM	H2 MFC set to  0.000000
5/3/2011	2:59:15 PM	BCl3 MFC set to  0.000000
5/3/2011	2:59:15 PM	PHl3 MFC set to  0.000000
5/3/2011	2:59:15 PM	SiCl4 MFC set to  0.000000
5/3/2011	2:59:15 PM	Bypass solenoid MFC set to  0.000000
5/3/2011	2:59:15 PM	Tube furnace set to 0
5/3/2011	3:00:15 PM	H2 valve closed
5/3/2011	3:00:15 PM	BCl3 valve closed
5/3/2011	3:00:15 PM	PH3 valve closed
5/3/2011	3:00:15 PM	SiCl4 pre valve closed
5/3/2011	3:00:15 PM	SiCl4 post valve closed
5/3/2011	3:00:15 PM	Bubbler valve closed
5/3/2011	3:00:15 PM	Helium valve opened
5/3/2011	3:00:15 PM	Main Vac valve opened
5/3/2011	3:00:15 PM	Bypass valve opened
5/3/2011	3:00:15 PM	Helium MFC set to  100.000000
5/3/2011	3:00:15 PM	H2 MFC set to  0.000000
5/3/2011	3:00:15 PM	BCl3 MFC set to  0.000000
5/3/2011	3:00:15 PM	PHl3 MFC set to  0.000000
5/3/2011	3:00:15 PM	SiCl4 MFC set to  0.000000
5/3/2011	3:00:15 PM	Bypass solenoid MFC set to  0.000000
5/3/2011	3:00:15 PM	Tube furnace set to 0
5/3/2011	3:01:15 PM	Helium valve closed
5/3/2011	3:01:15 PM	H2 valve closed
5/3/2011	3:01:15 PM	BCl3 valve closed
5/3/2011	3:01:15 PM	PH3 valve closed
5/3/2011	3:01:15 PM	SiCl4 pre valve closed
5/3/2011	3:01:15 PM	SiCl4 post valve closed
5/3/2011	3:01:15 PM	Bubbler valve closed
5/3/2011	3:01:15 PM	Main Vac valve opened
5/3/2011	3:01:15 PM	Bypass valve opened
5/3/2011	3:01:15 PM	Helium MFC set to  0.000000
5/3/2011	3:01:15 PM	H2 MFC set to  0.000000
5/3/2011	3:01:15 PM	BCl3 MFC set to  0.000000
5/3/2011	3:01:15 PM	PHl3 MFC set to  0.000000
5/3/2011	3:01:15 PM	SiCl4 MFC set to  0.000000
5/3/2011	3:01:15 PM	Bypass solenoid MFC set to  0.000000
5/3/2011	3:01:15 PM	Tube furnace set to 0
5/3/2011	3:02:15 PM	H2 valve closed
5/3/2011	3:02:15 PM	BCl3 valve closed
5/3/2011	3:02:15 PM	PH3 valve closed
5/3/2011	3:02:15 PM	SiCl4 pre valve closed
5/3/2011	3:02:15 PM	SiCl4 post valve closed
5/3/2011	3:02:15 PM	Bubbler valve closed
5/3/2011	3:02:15 PM	Helium valve opened
5/3/2011	3:02:15 PM	Main Vac valve opened
5/3/2011	3:02:15 PM	Bypass valve opened
5/3/2011	3:02:15 PM	Helium MFC set to  100.000000
5/3/2011	3:02:15 PM	H2 MFC set to  0.000000
5/3/2011	3:02:15 PM	BCl3 MFC set to  0.000000
5/3/2011	3:02:15 PM	PHl3 MFC set to  0.000000
5/3/2011	3:02:15 PM	SiCl4 MFC set to  0.000000
5/3/2011	3:02:15 PM	Bypass solenoid MFC set to  0.000000
5/3/2011	3:02:16 PM	Tube furnace set to 0
5/3/2011	3:03:16 PM	Helium valve closed
5/3/2011	3:03:16 PM	H2 valve closed
5/3/2011	3:03:16 PM	BCl3 valve closed
5/3/2011	3:03:16 PM	PH3 valve closed
5/3/2011	3:03:16 PM	SiCl4 pre valve closed
5/3/2011	3:03:16 PM	SiCl4 post valve closed
5/3/2011	3:03:16 PM	Bubbler valve closed
5/3/2011	3:03:16 PM	Main Vac valve opened
5/3/2011	3:03:16 PM	Bypass valve opened
5/3/2011	3:03:16 PM	Helium MFC set to  0.000000
5/3/2011	3:03:16 PM	H2 MFC set to  0.000000
5/3/2011	3:03:16 PM	BCl3 MFC set to  0.000000
5/3/2011	3:03:16 PM	PHl3 MFC set to  0.000000
5/3/2011	3:03:16 PM	SiCl4 MFC set to  0.000000
5/3/2011	3:03:16 PM	Bypass solenoid MFC set to  0.000000
5/3/2011	3:03:16 PM	Tube furnace set to 0
5/3/2011	3:04:16 PM	H2 valve closed
5/3/2011	3:04:16 PM	BCl3 valve closed
5/3/2011	3:04:16 PM	PH3 valve closed
5/3/2011	3:04:16 PM	SiCl4 pre valve closed
5/3/2011	3:04:16 PM	SiCl4 post valve closed
5/3/2011	3:04:16 PM	Bubbler valve closed
5/3/2011	3:04:16 PM	Helium valve opened
5/3/2011	3:04:16 PM	Main Vac valve opened
5/3/2011	3:04:16 PM	Bypass valve opened
5/3/2011	3:04:16 PM	Helium MFC set to  100.000000
5/3/2011	3:04:16 PM	H2 MFC set to  0.000000
5/3/2011	3:04:16 PM	BCl3 MFC set to  0.000000
5/3/2011	3:04:16 PM	PHl3 MFC set to  0.000000
5/3/2011	3:04:16 PM	SiCl4 MFC set to  0.000000
5/3/2011	3:04:16 PM	Bypass solenoid MFC set to  0.000000
5/3/2011	3:04:16 PM	Tube furnace set to 0
5/3/2011	3:05:16 PM	Helium valve closed
5/3/2011	3:05:16 PM	H2 valve closed
5/3/2011	3:05:16 PM	BCl3 valve closed
5/3/2011	3:05:16 PM	PH3 valve closed
5/3/2011	3:05:16 PM	SiCl4 pre valve closed
5/3/2011	3:05:16 PM	SiCl4 post valve closed
5/3/2011	3:05:16 PM	Bubbler valve closed
5/3/2011	3:05:16 PM	Main Vac valve opened
5/3/2011	3:05:16 PM	Bypass valve opened
5/3/2011	3:05:16 PM	Helium MFC set to  0.000000
5/3/2011	3:05:16 PM	H2 MFC set to  0.000000
5/3/2011	3:05:16 PM	BCl3 MFC set to  0.000000
5/3/2011	3:05:16 PM	PHl3 MFC set to  0.000000
5/3/2011	3:05:16 PM	SiCl4 MFC set to  0.000000
5/3/2011	3:05:16 PM	Bypass solenoid MFC set to  0.000000
5/3/2011	3:05:16 PM	Tube furnace set to 0
5/3/2011	3:06:16 PM	H2 valve closed
5/3/2011	3:06:16 PM	BCl3 valve closed
5/3/2011	3:06:16 PM	PH3 valve closed
5/3/2011	3:06:16 PM	SiCl4 pre valve closed
5/3/2011	3:06:16 PM	SiCl4 post valve closed
5/3/2011	3:06:16 PM	Bubbler valve closed
5/3/2011	3:06:16 PM	Helium valve opened
5/3/2011	3:06:16 PM	Main Vac valve opened
5/3/2011	3:06:16 PM	Bypass valve opened
5/3/2011	3:06:16 PM	Helium MFC set to  100.000000
5/3/2011	3:06:16 PM	H2 MFC set to  0.000000
5/3/2011	3:06:16 PM	BCl3 MFC set to  0.000000
5/3/2011	3:06:16 PM	PHl3 MFC set to  0.000000
5/3/2011	3:06:16 PM	SiCl4 MFC set to  0.000000
5/3/2011	3:06:16 PM	Bypass solenoid MFC set to  0.000000
5/3/2011	3:06:16 PM	Tube furnace set to 0
5/3/2011	3:07:16 PM	Helium valve closed
5/3/2011	3:07:16 PM	H2 valve closed
5/3/2011	3:07:16 PM	BCl3 valve closed
5/3/2011	3:07:16 PM	PH3 valve closed
5/3/2011	3:07:16 PM	SiCl4 pre valve closed
5/3/2011	3:07:16 PM	SiCl4 post valve closed
5/3/2011	3:07:16 PM	Bubbler valve closed
5/3/2011	3:07:16 PM	Main Vac valve opened
5/3/2011	3:07:16 PM	Bypass valve opened
5/3/2011	3:07:16 PM	Helium MFC set to  0.000000
5/3/2011	3:07:16 PM	H2 MFC set to  0.000000
5/3/2011	3:07:16 PM	BCl3 MFC set to  0.000000
5/3/2011	3:07:16 PM	PHl3 MFC set to  0.000000
5/3/2011	3:07:16 PM	SiCl4 MFC set to  0.000000
5/3/2011	3:07:16 PM	Bypass solenoid MFC set to  0.000000
5/3/2011	3:07:17 PM	Tube furnace set to 0
5/3/2011	3:07:18 PM	Run finished at 3:07 PM
5/3/2011	3:07:18 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
5/3/2011	3:14:38 PM	Helium MFC set to  20.000000
5/3/2011	3:14:39 PM	Helium valve opened
5/3/2011	3:27:45 PM	Helium valve closed
5/3/2011	3:29:16 PM	Recipe started at 3:29 PM
5/3/2011	3:29:16 PM	Helium valve closed
5/3/2011	3:29:16 PM	BCl3 valve closed
5/3/2011	3:29:16 PM	PH3 valve closed
5/3/2011	3:29:16 PM	SiCl4 pre valve closed
5/3/2011	3:29:16 PM	SiCl4 post valve closed
5/3/2011	3:29:16 PM	Main Vac valve closed
5/3/2011	3:29:16 PM	Bypass valve closed
5/3/2011	3:29:16 PM	Bubbler valve closed
5/3/2011	3:29:16 PM	H2 valve opened
5/3/2011	3:29:16 PM	Helium MFC set to  0.000000
5/3/2011	3:29:16 PM	H2 MFC set to  500.000000
5/3/2011	3:29:16 PM	BCl3 MFC set to  0.000000
5/3/2011	3:29:16 PM	PHl3 MFC set to  0.000000
5/3/2011	3:29:16 PM	SiCl4 MFC set to  0.000000
5/3/2011	3:29:16 PM	Bypass solenoid MFC set to  0.000000
5/3/2011	3:29:16 PM	Tube furnace set to 0
5/3/2011	3:30:38 PM	Helium valve closed
5/3/2011	3:30:38 PM	BCl3 valve closed
5/3/2011	3:30:38 PM	PH3 valve closed
5/3/2011	3:30:38 PM	SiCl4 pre valve closed
5/3/2011	3:30:38 PM	SiCl4 post valve closed
5/3/2011	3:30:38 PM	Main Vac valve closed
5/3/2011	3:30:38 PM	Bypass valve closed
5/3/2011	3:30:38 PM	H2 valve opened
5/3/2011	3:30:38 PM	Bubbler valve opened
5/3/2011	3:30:38 PM	Helium MFC set to  0.000000
5/3/2011	3:30:38 PM	H2 MFC set to  500.000000
5/3/2011	3:30:38 PM	BCl3 MFC set to  0.000000
5/3/2011	3:30:38 PM	PHl3 MFC set to  0.000000
5/3/2011	3:30:38 PM	SiCl4 MFC set to  0.000000
5/3/2011	3:30:38 PM	Bypass solenoid MFC set to  0.000000
5/3/2011	3:30:39 PM	Tube furnace set to 1000
5/3/2011	3:50:39 PM	Helium valve closed
5/3/2011	3:50:39 PM	BCl3 valve closed
5/3/2011	3:50:39 PM	PH3 valve closed
5/3/2011	3:50:39 PM	Main Vac valve closed
5/3/2011	3:50:39 PM	Bypass valve closed
5/3/2011	3:50:39 PM	H2 valve opened
5/3/2011	3:50:39 PM	SiCl4 pre valve opened
5/3/2011	3:50:39 PM	SiCl4 post valve opened
5/3/2011	3:50:39 PM	Bubbler valve opened
5/3/2011	3:50:39 PM	Helium MFC set to  0.000000
5/3/2011	3:50:39 PM	H2 MFC set to  500.000000
5/3/2011	3:50:39 PM	BCl3 MFC set to  0.000000
5/3/2011	3:50:39 PM	PHl3 MFC set to  0.000000
5/3/2011	3:50:39 PM	SiCl4 MFC set to  50.000000
5/3/2011	3:50:39 PM	Bypass solenoid MFC set to  0.000000
5/3/2011	3:50:39 PM	Tube furnace set to 1000
5/3/2011	4:10:39 PM	Helium valve closed
5/3/2011	4:10:39 PM	BCl3 valve closed
5/3/2011	4:10:39 PM	PH3 valve closed
5/3/2011	4:10:39 PM	SiCl4 pre valve closed
5/3/2011	4:10:39 PM	SiCl4 post valve closed
5/3/2011	4:10:39 PM	Main Vac valve closed
5/3/2011	4:10:39 PM	Bypass valve closed
5/3/2011	4:10:39 PM	H2 valve opened
5/3/2011	4:10:39 PM	Bubbler valve opened
5/3/2011	4:10:39 PM	Helium MFC set to  0.000000
5/3/2011	4:10:39 PM	H2 MFC set to  500.000000
5/3/2011	4:10:39 PM	BCl3 MFC set to  0.000000
5/3/2011	4:10:39 PM	PHl3 MFC set to  0.000000
5/3/2011	4:10:39 PM	SiCl4 MFC set to  0.000000
5/3/2011	4:10:39 PM	Bypass solenoid MFC set to  0.000000
5/3/2011	4:10:39 PM	Tube furnace set to 0
5/3/2011	4:40:15 PM	H2 valve closed
5/3/2011	4:40:15 PM	BCl3 valve closed
5/3/2011	4:40:15 PM	PH3 valve closed
5/3/2011	4:40:15 PM	SiCl4 pre valve closed
5/3/2011	4:40:15 PM	SiCl4 post valve closed
5/3/2011	4:40:15 PM	Main Vac valve closed
5/3/2011	4:40:15 PM	Bypass valve closed
5/3/2011	4:40:15 PM	Helium valve opened
5/3/2011	4:40:15 PM	Bubbler valve opened
5/3/2011	4:40:15 PM	Helium MFC set to  500.000000
5/3/2011	4:40:15 PM	H2 MFC set to  0.000000
5/3/2011	4:40:15 PM	BCl3 MFC set to  0.000000
5/3/2011	4:40:15 PM	PHl3 MFC set to  0.000000
5/3/2011	4:40:15 PM	SiCl4 MFC set to  0.000000
5/3/2011	4:40:15 PM	Bypass solenoid MFC set to  0.000000
5/3/2011	4:40:15 PM	Tube furnace set to 0
5/3/2011	4:40:15 PM	Helium valve closed
5/3/2011	4:40:15 PM	H2 valve closed
5/3/2011	4:40:15 PM	BCl3 valve closed
5/3/2011	4:40:15 PM	PH3 valve closed
5/3/2011	4:40:15 PM	SiCl4 pre valve closed
5/3/2011	4:40:15 PM	SiCl4 post valve closed
5/3/2011	4:40:15 PM	Main Vac valve closed
5/3/2011	4:40:15 PM	Bypass valve closed
5/3/2011	4:40:15 PM	Bubbler valve closed
5/3/2011	4:40:15 PM	Helium MFC set to  0.000000
5/3/2011	4:40:15 PM	H2 MFC set to  0.000000
5/3/2011	4:40:15 PM	BCl3 MFC set to  0.000000
5/3/2011	4:40:15 PM	PHl3 MFC set to  0.000000
5/3/2011	4:40:15 PM	SiCl4 MFC set to  0.000000
5/3/2011	4:40:15 PM	Bypass solenoid MFC set to  0.000000
5/3/2011	4:40:15 PM	Tube furnace set to 0
5/3/2011	4:40:16 PM	Run finished at 4:40 PM
5/3/2011	4:45:31 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/3/2011	4:45:32 PM	Recipe started at 4:45 PM
5/3/2011	4:45:32 PM	Helium valve closed
5/3/2011	4:45:32 PM	H2 valve closed
5/3/2011	4:45:32 PM	BCl3 valve closed
5/3/2011	4:45:32 PM	PH3 valve closed
5/3/2011	4:45:32 PM	SiCl4 pre valve closed
5/3/2011	4:45:32 PM	SiCl4 post valve closed
5/3/2011	4:45:32 PM	Main Vac valve closed
5/3/2011	4:45:32 PM	Bubbler valve closed
5/3/2011	4:45:32 PM	Bypass valve opened
5/3/2011	4:45:32 PM	Helium MFC set to  0.000000
5/3/2011	4:45:32 PM	H2 MFC set to  0.000000
5/3/2011	4:45:32 PM	BCl3 MFC set to  0.000000
5/3/2011	4:45:32 PM	PHl3 MFC set to  0.000000
5/3/2011	4:45:32 PM	SiCl4 MFC set to  0.000000
5/3/2011	4:45:32 PM	Bypass solenoid MFC set to  0.000000
5/3/2011	4:45:32 PM	Tube furnace set to 0
5/3/2011	4:46:02 PM	Helium valve closed
5/3/2011	4:46:02 PM	H2 valve closed
5/3/2011	4:46:02 PM	BCl3 valve closed
5/3/2011	4:46:02 PM	PH3 valve closed
5/3/2011	4:46:02 PM	SiCl4 pre valve closed
5/3/2011	4:46:02 PM	SiCl4 post valve closed
5/3/2011	4:46:02 PM	Bubbler valve closed
5/3/2011	4:46:02 PM	Main Vac valve opened
5/3/2011	4:46:02 PM	Bypass valve opened
5/3/2011	4:46:02 PM	Helium MFC set to  0.000000
5/3/2011	4:46:02 PM	H2 MFC set to  0.000000
5/3/2011	4:46:02 PM	BCl3 MFC set to  0.000000
5/3/2011	4:46:02 PM	PHl3 MFC set to  0.000000
5/3/2011	4:46:02 PM	SiCl4 MFC set to  0.000000
5/3/2011	4:46:02 PM	Bypass solenoid MFC set to  0.000000
5/3/2011	4:46:02 PM	Tube furnace set to 0
5/3/2011	4:46:03 PM	Run finished at 4:46 PM
5/3/2011	4:46:03 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/3/2011	4:46:19 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
5/3/2011	4:46:31 PM	Recipe started at 4:46 PM
5/3/2011	4:46:31 PM	Helium valve closed
5/3/2011	4:46:31 PM	H2 valve closed
5/3/2011	4:46:31 PM	BCl3 valve closed
5/3/2011	4:46:31 PM	PH3 valve closed
5/3/2011	4:46:31 PM	SiCl4 pre valve closed
5/3/2011	4:46:31 PM	SiCl4 post valve closed
5/3/2011	4:46:31 PM	Main Vac valve closed
5/3/2011	4:46:31 PM	Bubbler valve closed
5/3/2011	4:46:31 PM	Bypass valve opened
5/3/2011	4:46:31 PM	Helium MFC set to  0.000000
5/3/2011	4:46:31 PM	H2 MFC set to  0.000000
5/3/2011	4:46:31 PM	BCl3 MFC set to  0.000000
5/3/2011	4:46:31 PM	PHl3 MFC set to  0.000000
5/3/2011	4:46:31 PM	SiCl4 MFC set to  0.000000
5/3/2011	4:46:31 PM	Bypass solenoid MFC set to  0.000000
5/3/2011	4:46:31 PM	Tube furnace set to 0
5/3/2011	4:46:32 PM	Helium valve closed
5/3/2011	4:46:32 PM	H2 valve closed
5/3/2011	4:46:32 PM	BCl3 valve closed
5/3/2011	4:46:32 PM	PH3 valve closed
5/3/2011	4:46:32 PM	SiCl4 pre valve closed
5/3/2011	4:46:32 PM	SiCl4 post valve closed
5/3/2011	4:46:32 PM	Bubbler valve closed
5/3/2011	4:46:32 PM	Main Vac valve opened
5/3/2011	4:46:32 PM	Bypass valve opened
5/3/2011	4:46:32 PM	Helium MFC set to  0.000000
5/3/2011	4:46:32 PM	H2 MFC set to  0.000000
5/3/2011	4:46:32 PM	BCl3 MFC set to  0.000000
5/3/2011	4:46:32 PM	PHl3 MFC set to  0.000000
5/3/2011	4:46:32 PM	SiCl4 MFC set to  0.000000
5/3/2011	4:46:32 PM	Bypass solenoid MFC set to  0.000000
5/3/2011	4:46:32 PM	Tube furnace set to 0
5/3/2011	4:47:32 PM	H2 valve closed
5/3/2011	4:47:32 PM	BCl3 valve closed
5/3/2011	4:47:32 PM	PH3 valve closed
5/3/2011	4:47:32 PM	SiCl4 pre valve closed
5/3/2011	4:47:32 PM	SiCl4 post valve closed
5/3/2011	4:47:32 PM	Bubbler valve closed
5/3/2011	4:47:32 PM	Helium valve opened
5/3/2011	4:47:32 PM	Main Vac valve opened
5/3/2011	4:47:32 PM	Bypass valve opened
5/3/2011	4:47:32 PM	Helium MFC set to  100.000000
5/3/2011	4:47:32 PM	H2 MFC set to  0.000000
5/3/2011	4:47:32 PM	BCl3 MFC set to  0.000000
5/3/2011	4:47:32 PM	PHl3 MFC set to  0.000000
5/3/2011	4:47:32 PM	SiCl4 MFC set to  0.000000
5/3/2011	4:47:32 PM	Bypass solenoid MFC set to  0.000000
5/3/2011	4:47:32 PM	Tube furnace set to 0
5/3/2011	4:48:32 PM	Helium valve closed
5/3/2011	4:48:32 PM	H2 valve closed
5/3/2011	4:48:32 PM	BCl3 valve closed
5/3/2011	4:48:32 PM	PH3 valve closed
5/3/2011	4:48:32 PM	SiCl4 pre valve closed
5/3/2011	4:48:32 PM	SiCl4 post valve closed
5/3/2011	4:48:32 PM	Bubbler valve closed
5/3/2011	4:48:32 PM	Main Vac valve opened
5/3/2011	4:48:32 PM	Bypass valve opened
5/3/2011	4:48:32 PM	Helium MFC set to  0.000000
5/3/2011	4:48:32 PM	H2 MFC set to  0.000000
5/3/2011	4:48:32 PM	BCl3 MFC set to  0.000000
5/3/2011	4:48:32 PM	PHl3 MFC set to  0.000000
5/3/2011	4:48:32 PM	SiCl4 MFC set to  0.000000
5/3/2011	4:48:32 PM	Bypass solenoid MFC set to  0.000000
5/3/2011	4:48:32 PM	Tube furnace set to 0
5/3/2011	4:49:32 PM	H2 valve closed
5/3/2011	4:49:32 PM	BCl3 valve closed
5/3/2011	4:49:32 PM	PH3 valve closed
5/3/2011	4:49:32 PM	SiCl4 pre valve closed
5/3/2011	4:49:32 PM	SiCl4 post valve closed
5/3/2011	4:49:32 PM	Bubbler valve closed
5/3/2011	4:49:32 PM	Helium valve opened
5/3/2011	4:49:32 PM	Main Vac valve opened
5/3/2011	4:49:32 PM	Bypass valve opened
5/3/2011	4:49:32 PM	Helium MFC set to  100.000000
5/3/2011	4:49:32 PM	H2 MFC set to  0.000000
5/3/2011	4:49:32 PM	BCl3 MFC set to  0.000000
5/3/2011	4:49:32 PM	PHl3 MFC set to  0.000000
5/3/2011	4:49:32 PM	SiCl4 MFC set to  0.000000
5/3/2011	4:49:32 PM	Bypass solenoid MFC set to  0.000000
5/3/2011	4:49:32 PM	Tube furnace set to 0
5/3/2011	4:50:33 PM	Helium valve closed
5/3/2011	4:50:33 PM	H2 valve closed
5/3/2011	4:50:33 PM	BCl3 valve closed
5/3/2011	4:50:33 PM	PH3 valve closed
5/3/2011	4:50:33 PM	SiCl4 pre valve closed
5/3/2011	4:50:33 PM	SiCl4 post valve closed
5/3/2011	4:50:33 PM	Bubbler valve closed
5/3/2011	4:50:33 PM	Main Vac valve opened
5/3/2011	4:50:33 PM	Bypass valve opened
5/3/2011	4:50:33 PM	Helium MFC set to  0.000000
5/3/2011	4:50:33 PM	H2 MFC set to  0.000000
5/3/2011	4:50:33 PM	BCl3 MFC set to  0.000000
5/3/2011	4:50:33 PM	PHl3 MFC set to  0.000000
5/3/2011	4:50:33 PM	SiCl4 MFC set to  0.000000
5/3/2011	4:50:33 PM	Bypass solenoid MFC set to  0.000000
5/3/2011	4:50:33 PM	Tube furnace set to 0
5/3/2011	4:51:33 PM	H2 valve closed
5/3/2011	4:51:33 PM	BCl3 valve closed
5/3/2011	4:51:33 PM	PH3 valve closed
5/3/2011	4:51:33 PM	SiCl4 pre valve closed
5/3/2011	4:51:33 PM	SiCl4 post valve closed
5/3/2011	4:51:33 PM	Bubbler valve closed
5/3/2011	4:51:33 PM	Helium valve opened
5/3/2011	4:51:33 PM	Main Vac valve opened
5/3/2011	4:51:33 PM	Bypass valve opened
5/3/2011	4:51:33 PM	Helium MFC set to  100.000000
5/3/2011	4:51:33 PM	H2 MFC set to  0.000000
5/3/2011	4:51:33 PM	BCl3 MFC set to  0.000000
5/3/2011	4:51:33 PM	PHl3 MFC set to  0.000000
5/3/2011	4:51:33 PM	SiCl4 MFC set to  0.000000
5/3/2011	4:51:33 PM	Bypass solenoid MFC set to  0.000000
5/3/2011	4:51:33 PM	Tube furnace set to 0
5/3/2011	4:52:33 PM	Helium valve closed
5/3/2011	4:52:33 PM	H2 valve closed
5/3/2011	4:52:33 PM	BCl3 valve closed
5/3/2011	4:52:33 PM	PH3 valve closed
5/3/2011	4:52:33 PM	SiCl4 pre valve closed
5/3/2011	4:52:33 PM	SiCl4 post valve closed
5/3/2011	4:52:33 PM	Bubbler valve closed
5/3/2011	4:52:33 PM	Main Vac valve opened
5/3/2011	4:52:33 PM	Bypass valve opened
5/3/2011	4:52:33 PM	Helium MFC set to  0.000000
5/3/2011	4:52:33 PM	H2 MFC set to  0.000000
5/3/2011	4:52:33 PM	BCl3 MFC set to  0.000000
5/3/2011	4:52:33 PM	PHl3 MFC set to  0.000000
5/3/2011	4:52:33 PM	SiCl4 MFC set to  0.000000
5/3/2011	4:52:33 PM	Bypass solenoid MFC set to  0.000000
5/3/2011	4:52:33 PM	Tube furnace set to 0
5/3/2011	4:53:33 PM	H2 valve closed
5/3/2011	4:53:33 PM	BCl3 valve closed
5/3/2011	4:53:33 PM	PH3 valve closed
5/3/2011	4:53:33 PM	SiCl4 pre valve closed
5/3/2011	4:53:33 PM	SiCl4 post valve closed
5/3/2011	4:53:33 PM	Bubbler valve closed
5/3/2011	4:53:33 PM	Helium valve opened
5/3/2011	4:53:33 PM	Main Vac valve opened
5/3/2011	4:53:33 PM	Bypass valve opened
5/3/2011	4:53:33 PM	Helium MFC set to  100.000000
5/3/2011	4:53:33 PM	H2 MFC set to  0.000000
5/3/2011	4:53:33 PM	BCl3 MFC set to  0.000000
5/3/2011	4:53:33 PM	PHl3 MFC set to  0.000000
5/3/2011	4:53:33 PM	SiCl4 MFC set to  0.000000
5/3/2011	4:53:33 PM	Bypass solenoid MFC set to  0.000000
5/3/2011	4:53:33 PM	Tube furnace set to 0
5/3/2011	4:54:33 PM	Helium valve closed
5/3/2011	4:54:33 PM	H2 valve closed
5/3/2011	4:54:33 PM	BCl3 valve closed
5/3/2011	4:54:33 PM	PH3 valve closed
5/3/2011	4:54:33 PM	SiCl4 pre valve closed
5/3/2011	4:54:33 PM	SiCl4 post valve closed
5/3/2011	4:54:33 PM	Bubbler valve closed
5/3/2011	4:54:33 PM	Main Vac valve opened
5/3/2011	4:54:33 PM	Bypass valve opened
5/3/2011	4:54:33 PM	Helium MFC set to  0.000000
5/3/2011	4:54:33 PM	H2 MFC set to  0.000000
5/3/2011	4:54:33 PM	BCl3 MFC set to  0.000000
5/3/2011	4:54:33 PM	PHl3 MFC set to  0.000000
5/3/2011	4:54:33 PM	SiCl4 MFC set to  0.000000
5/3/2011	4:54:33 PM	Bypass solenoid MFC set to  0.000000
5/3/2011	4:54:33 PM	Tube furnace set to 0
5/3/2011	4:55:34 PM	H2 valve closed
5/3/2011	4:55:34 PM	BCl3 valve closed
5/3/2011	4:55:34 PM	PH3 valve closed
5/3/2011	4:55:34 PM	SiCl4 pre valve closed
5/3/2011	4:55:34 PM	SiCl4 post valve closed
5/3/2011	4:55:34 PM	Bubbler valve closed
5/3/2011	4:55:34 PM	Helium valve opened
5/3/2011	4:55:34 PM	Main Vac valve opened
5/3/2011	4:55:34 PM	Bypass valve opened
5/3/2011	4:55:34 PM	Helium MFC set to  100.000000
5/3/2011	4:55:34 PM	H2 MFC set to  0.000000
5/3/2011	4:55:34 PM	BCl3 MFC set to  0.000000
5/3/2011	4:55:34 PM	PHl3 MFC set to  0.000000
5/3/2011	4:55:34 PM	SiCl4 MFC set to  0.000000
5/3/2011	4:55:34 PM	Bypass solenoid MFC set to  0.000000
5/3/2011	4:55:34 PM	Tube furnace set to 0
5/3/2011	4:56:34 PM	Helium valve closed
5/3/2011	4:56:34 PM	H2 valve closed
5/3/2011	4:56:34 PM	BCl3 valve closed
5/3/2011	4:56:34 PM	PH3 valve closed
5/3/2011	4:56:34 PM	SiCl4 pre valve closed
5/3/2011	4:56:34 PM	SiCl4 post valve closed
5/3/2011	4:56:34 PM	Bubbler valve closed
5/3/2011	4:56:34 PM	Main Vac valve opened
5/3/2011	4:56:34 PM	Bypass valve opened
5/3/2011	4:56:34 PM	Helium MFC set to  0.000000
5/3/2011	4:56:34 PM	H2 MFC set to  0.000000
5/3/2011	4:56:34 PM	BCl3 MFC set to  0.000000
5/3/2011	4:56:34 PM	PHl3 MFC set to  0.000000
5/3/2011	4:56:34 PM	SiCl4 MFC set to  0.000000
5/3/2011	4:56:34 PM	Bypass solenoid MFC set to  0.000000
5/3/2011	4:56:34 PM	Tube furnace set to 0
5/3/2011	4:57:34 PM	H2 valve closed
5/3/2011	4:57:34 PM	BCl3 valve closed
5/3/2011	4:57:34 PM	PH3 valve closed
5/3/2011	4:57:34 PM	SiCl4 pre valve closed
5/3/2011	4:57:34 PM	SiCl4 post valve closed
5/3/2011	4:57:34 PM	Bubbler valve closed
5/3/2011	4:57:34 PM	Helium valve opened
5/3/2011	4:57:34 PM	Main Vac valve opened
5/3/2011	4:57:34 PM	Bypass valve opened
5/3/2011	4:57:34 PM	Helium MFC set to  100.000000
5/3/2011	4:57:34 PM	H2 MFC set to  0.000000
5/3/2011	4:57:34 PM	BCl3 MFC set to  0.000000
5/3/2011	4:57:34 PM	PHl3 MFC set to  0.000000
5/3/2011	4:57:34 PM	SiCl4 MFC set to  0.000000
5/3/2011	4:57:34 PM	Bypass solenoid MFC set to  0.000000
5/3/2011	4:57:34 PM	Tube furnace set to 0
5/3/2011	4:58:34 PM	Helium valve closed
5/3/2011	4:58:34 PM	H2 valve closed
5/3/2011	4:58:34 PM	BCl3 valve closed
5/3/2011	4:58:34 PM	PH3 valve closed
5/3/2011	4:58:34 PM	SiCl4 pre valve closed
5/3/2011	4:58:34 PM	SiCl4 post valve closed
5/3/2011	4:58:34 PM	Bubbler valve closed
5/3/2011	4:58:34 PM	Main Vac valve opened
5/3/2011	4:58:34 PM	Bypass valve opened
5/3/2011	4:58:34 PM	Helium MFC set to  0.000000
5/3/2011	4:58:34 PM	H2 MFC set to  0.000000
5/3/2011	4:58:34 PM	BCl3 MFC set to  0.000000
5/3/2011	4:58:34 PM	PHl3 MFC set to  0.000000
5/3/2011	4:58:34 PM	SiCl4 MFC set to  0.000000
5/3/2011	4:58:34 PM	Bypass solenoid MFC set to  0.000000
5/3/2011	4:58:34 PM	Tube furnace set to 0
5/3/2011	4:59:34 PM	H2 valve closed
5/3/2011	4:59:34 PM	BCl3 valve closed
5/3/2011	4:59:34 PM	PH3 valve closed
5/3/2011	4:59:34 PM	SiCl4 pre valve closed
5/3/2011	4:59:34 PM	SiCl4 post valve closed
5/3/2011	4:59:34 PM	Bubbler valve closed
5/3/2011	4:59:34 PM	Helium valve opened
5/3/2011	4:59:34 PM	Main Vac valve opened
5/3/2011	4:59:34 PM	Bypass valve opened
5/3/2011	4:59:34 PM	Helium MFC set to  100.000000
5/3/2011	4:59:34 PM	H2 MFC set to  0.000000
5/3/2011	4:59:34 PM	BCl3 MFC set to  0.000000
5/3/2011	4:59:34 PM	PHl3 MFC set to  0.000000
5/3/2011	4:59:34 PM	SiCl4 MFC set to  0.000000
5/3/2011	4:59:34 PM	Bypass solenoid MFC set to  0.000000
5/3/2011	4:59:35 PM	Tube furnace set to 0
5/3/2011	5:00:35 PM	Helium valve closed
5/3/2011	5:00:35 PM	H2 valve closed
5/3/2011	5:00:35 PM	BCl3 valve closed
5/3/2011	5:00:35 PM	PH3 valve closed
5/3/2011	5:00:35 PM	SiCl4 pre valve closed
5/3/2011	5:00:35 PM	SiCl4 post valve closed
5/3/2011	5:00:35 PM	Bubbler valve closed
5/3/2011	5:00:35 PM	Main Vac valve opened
5/3/2011	5:00:35 PM	Bypass valve opened
5/3/2011	5:00:35 PM	Helium MFC set to  0.000000
5/3/2011	5:00:35 PM	H2 MFC set to  0.000000
5/3/2011	5:00:35 PM	BCl3 MFC set to  0.000000
5/3/2011	5:00:35 PM	PHl3 MFC set to  0.000000
5/3/2011	5:00:35 PM	SiCl4 MFC set to  0.000000
5/3/2011	5:00:35 PM	Bypass solenoid MFC set to  0.000000
5/3/2011	5:00:35 PM	Tube furnace set to 0
5/3/2011	5:01:35 PM	H2 valve closed
5/3/2011	5:01:35 PM	BCl3 valve closed
5/3/2011	5:01:35 PM	PH3 valve closed
5/3/2011	5:01:35 PM	SiCl4 pre valve closed
5/3/2011	5:01:35 PM	SiCl4 post valve closed
5/3/2011	5:01:35 PM	Bubbler valve closed
5/3/2011	5:01:35 PM	Helium valve opened
5/3/2011	5:01:35 PM	Main Vac valve opened
5/3/2011	5:01:35 PM	Bypass valve opened
5/3/2011	5:01:35 PM	Helium MFC set to  100.000000
5/3/2011	5:01:35 PM	H2 MFC set to  0.000000
5/3/2011	5:01:35 PM	BCl3 MFC set to  0.000000
5/3/2011	5:01:35 PM	PHl3 MFC set to  0.000000
5/3/2011	5:01:35 PM	SiCl4 MFC set to  0.000000
5/3/2011	5:01:35 PM	Bypass solenoid MFC set to  0.000000
5/3/2011	5:01:35 PM	Tube furnace set to 0
5/3/2011	5:02:35 PM	Helium valve closed
5/3/2011	5:02:35 PM	H2 valve closed
5/3/2011	5:02:35 PM	BCl3 valve closed
5/3/2011	5:02:35 PM	PH3 valve closed
5/3/2011	5:02:35 PM	SiCl4 pre valve closed
5/3/2011	5:02:35 PM	SiCl4 post valve closed
5/3/2011	5:02:35 PM	Bubbler valve closed
5/3/2011	5:02:35 PM	Main Vac valve opened
5/3/2011	5:02:35 PM	Bypass valve opened
5/3/2011	5:02:35 PM	Helium MFC set to  0.000000
5/3/2011	5:02:35 PM	H2 MFC set to  0.000000
5/3/2011	5:02:35 PM	BCl3 MFC set to  0.000000
5/3/2011	5:02:35 PM	PHl3 MFC set to  0.000000
5/3/2011	5:02:35 PM	SiCl4 MFC set to  0.000000
5/3/2011	5:02:35 PM	Bypass solenoid MFC set to  0.000000
5/3/2011	5:02:35 PM	Tube furnace set to 0
5/3/2011	5:03:35 PM	H2 valve closed
5/3/2011	5:03:35 PM	BCl3 valve closed
5/3/2011	5:03:35 PM	PH3 valve closed
5/3/2011	5:03:35 PM	SiCl4 pre valve closed
5/3/2011	5:03:35 PM	SiCl4 post valve closed
5/3/2011	5:03:35 PM	Bubbler valve closed
5/3/2011	5:03:35 PM	Helium valve opened
5/3/2011	5:03:35 PM	Main Vac valve opened
5/3/2011	5:03:35 PM	Bypass valve opened
5/3/2011	5:03:35 PM	Helium MFC set to  100.000000
5/3/2011	5:03:35 PM	H2 MFC set to  0.000000
5/3/2011	5:03:35 PM	BCl3 MFC set to  0.000000
5/3/2011	5:03:35 PM	PHl3 MFC set to  0.000000
5/3/2011	5:03:35 PM	SiCl4 MFC set to  0.000000
5/3/2011	5:03:35 PM	Bypass solenoid MFC set to  0.000000
5/3/2011	5:03:35 PM	Tube furnace set to 0
5/3/2011	5:04:35 PM	Helium valve closed
5/3/2011	5:04:35 PM	H2 valve closed
5/3/2011	5:04:35 PM	BCl3 valve closed
5/3/2011	5:04:35 PM	PH3 valve closed
5/3/2011	5:04:35 PM	SiCl4 pre valve closed
5/3/2011	5:04:35 PM	SiCl4 post valve closed
5/3/2011	5:04:35 PM	Bubbler valve closed
5/3/2011	5:04:35 PM	Main Vac valve opened
5/3/2011	5:04:35 PM	Bypass valve opened
5/3/2011	5:04:35 PM	Helium MFC set to  0.000000
5/3/2011	5:04:35 PM	H2 MFC set to  0.000000
5/3/2011	5:04:35 PM	BCl3 MFC set to  0.000000
5/3/2011	5:04:35 PM	PHl3 MFC set to  0.000000
5/3/2011	5:04:35 PM	SiCl4 MFC set to  0.000000
5/3/2011	5:04:35 PM	Bypass solenoid MFC set to  0.000000
5/3/2011	5:04:36 PM	Tube furnace set to 0
5/3/2011	5:05:36 PM	H2 valve closed
5/3/2011	5:05:36 PM	BCl3 valve closed
5/3/2011	5:05:36 PM	PH3 valve closed
5/3/2011	5:05:36 PM	SiCl4 pre valve closed
5/3/2011	5:05:36 PM	SiCl4 post valve closed
5/3/2011	5:05:36 PM	Bubbler valve closed
5/3/2011	5:05:36 PM	Helium valve opened
5/3/2011	5:05:36 PM	Main Vac valve opened
5/3/2011	5:05:36 PM	Bypass valve opened
5/3/2011	5:05:36 PM	Helium MFC set to  100.000000
5/3/2011	5:05:36 PM	H2 MFC set to  0.000000
5/3/2011	5:05:36 PM	BCl3 MFC set to  0.000000
5/3/2011	5:05:36 PM	PHl3 MFC set to  0.000000
5/3/2011	5:05:36 PM	SiCl4 MFC set to  0.000000
5/3/2011	5:05:36 PM	Bypass solenoid MFC set to  0.000000
5/3/2011	5:05:36 PM	Tube furnace set to 0
5/3/2011	5:06:36 PM	Helium valve closed
5/3/2011	5:06:36 PM	H2 valve closed
5/3/2011	5:06:36 PM	BCl3 valve closed
5/3/2011	5:06:36 PM	PH3 valve closed
5/3/2011	5:06:36 PM	SiCl4 pre valve closed
5/3/2011	5:06:36 PM	SiCl4 post valve closed
5/3/2011	5:06:36 PM	Bubbler valve closed
5/3/2011	5:06:36 PM	Main Vac valve opened
5/3/2011	5:06:36 PM	Bypass valve opened
5/3/2011	5:06:36 PM	Helium MFC set to  0.000000
5/3/2011	5:06:36 PM	H2 MFC set to  0.000000
5/3/2011	5:06:36 PM	BCl3 MFC set to  0.000000
5/3/2011	5:06:36 PM	PHl3 MFC set to  0.000000
5/3/2011	5:06:36 PM	SiCl4 MFC set to  0.000000
5/3/2011	5:06:36 PM	Bypass solenoid MFC set to  0.000000
5/3/2011	5:06:36 PM	Tube furnace set to 0
5/3/2011	5:06:37 PM	Run finished at 5:06 PM
5/3/2011	5:06:37 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
5/3/2011	5:20:32 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
5/3/2011	5:20:43 PM	Recipe started at 5:20 PM
5/3/2011	5:20:43 PM	Helium valve closed
5/3/2011	5:20:43 PM	H2 valve closed
5/3/2011	5:20:43 PM	BCl3 valve closed
5/3/2011	5:20:43 PM	PH3 valve closed
5/3/2011	5:20:43 PM	SiCl4 pre valve closed
5/3/2011	5:20:43 PM	SiCl4 post valve closed
5/3/2011	5:20:43 PM	Main Vac valve closed
5/3/2011	5:20:43 PM	Bubbler valve closed
5/3/2011	5:20:43 PM	Bypass valve opened
5/3/2011	5:20:43 PM	Helium MFC set to  0.000000
5/3/2011	5:20:43 PM	H2 MFC set to  0.000000
5/3/2011	5:20:43 PM	BCl3 MFC set to  0.000000
5/3/2011	5:20:43 PM	PHl3 MFC set to  0.000000
5/3/2011	5:20:43 PM	SiCl4 MFC set to  0.000000
5/3/2011	5:20:43 PM	Bypass solenoid MFC set to  0.000000
5/3/2011	5:20:44 PM	Tube furnace set to 0
5/3/2011	5:20:44 PM	Helium valve closed
5/3/2011	5:20:44 PM	H2 valve closed
5/3/2011	5:20:44 PM	BCl3 valve closed
5/3/2011	5:20:44 PM	PH3 valve closed
5/3/2011	5:20:44 PM	SiCl4 pre valve closed
5/3/2011	5:20:44 PM	SiCl4 post valve closed
5/3/2011	5:20:44 PM	Bubbler valve closed
5/3/2011	5:20:44 PM	Main Vac valve opened
5/3/2011	5:20:44 PM	Bypass valve opened
5/3/2011	5:20:44 PM	Helium MFC set to  0.000000
5/3/2011	5:20:44 PM	H2 MFC set to  0.000000
5/3/2011	5:20:44 PM	BCl3 MFC set to  0.000000
5/3/2011	5:20:44 PM	PHl3 MFC set to  0.000000
5/3/2011	5:20:44 PM	SiCl4 MFC set to  0.000000
5/3/2011	5:20:44 PM	Bypass solenoid MFC set to  0.000000
5/3/2011	5:20:44 PM	Tube furnace set to 0
5/3/2011	5:21:44 PM	H2 valve closed
5/3/2011	5:21:44 PM	BCl3 valve closed
5/3/2011	5:21:44 PM	PH3 valve closed
5/3/2011	5:21:44 PM	SiCl4 pre valve closed
5/3/2011	5:21:44 PM	SiCl4 post valve closed
5/3/2011	5:21:44 PM	Bubbler valve closed
5/3/2011	5:21:44 PM	Helium valve opened
5/3/2011	5:21:44 PM	Main Vac valve opened
5/3/2011	5:21:44 PM	Bypass valve opened
5/3/2011	5:21:44 PM	Helium MFC set to  100.000000
5/3/2011	5:21:44 PM	H2 MFC set to  0.000000
5/3/2011	5:21:44 PM	BCl3 MFC set to  0.000000
5/3/2011	5:21:44 PM	PHl3 MFC set to  0.000000
5/3/2011	5:21:44 PM	SiCl4 MFC set to  0.000000
5/3/2011	5:21:44 PM	Bypass solenoid MFC set to  0.000000
5/3/2011	5:21:44 PM	Tube furnace set to 0
5/3/2011	5:22:44 PM	Helium valve closed
5/3/2011	5:22:44 PM	H2 valve closed
5/3/2011	5:22:44 PM	BCl3 valve closed
5/3/2011	5:22:44 PM	PH3 valve closed
5/3/2011	5:22:44 PM	SiCl4 pre valve closed
5/3/2011	5:22:44 PM	SiCl4 post valve closed
5/3/2011	5:22:44 PM	Bubbler valve closed
5/3/2011	5:22:44 PM	Main Vac valve opened
5/3/2011	5:22:44 PM	Bypass valve opened
5/3/2011	5:22:44 PM	Helium MFC set to  0.000000
5/3/2011	5:22:44 PM	H2 MFC set to  0.000000
5/3/2011	5:22:44 PM	BCl3 MFC set to  0.000000
5/3/2011	5:22:44 PM	PHl3 MFC set to  0.000000
5/3/2011	5:22:44 PM	SiCl4 MFC set to  0.000000
5/3/2011	5:22:44 PM	Bypass solenoid MFC set to  0.000000
5/3/2011	5:22:44 PM	Tube furnace set to 0
5/3/2011	5:23:44 PM	H2 valve closed
5/3/2011	5:23:44 PM	BCl3 valve closed
5/3/2011	5:23:44 PM	PH3 valve closed
5/3/2011	5:23:44 PM	SiCl4 pre valve closed
5/3/2011	5:23:44 PM	SiCl4 post valve closed
5/3/2011	5:23:44 PM	Bubbler valve closed
5/3/2011	5:23:44 PM	Helium valve opened
5/3/2011	5:23:44 PM	Main Vac valve opened
5/3/2011	5:23:44 PM	Bypass valve opened
5/3/2011	5:23:44 PM	Helium MFC set to  100.000000
5/3/2011	5:23:45 PM	H2 MFC set to  0.000000
5/3/2011	5:23:45 PM	BCl3 MFC set to  0.000000
5/3/2011	5:23:45 PM	PHl3 MFC set to  0.000000
5/3/2011	5:23:45 PM	SiCl4 MFC set to  0.000000
5/3/2011	5:23:45 PM	Bypass solenoid MFC set to  0.000000
5/3/2011	5:23:45 PM	Tube furnace set to 0
5/3/2011	5:24:45 PM	Helium valve closed
5/3/2011	5:24:45 PM	H2 valve closed
5/3/2011	5:24:45 PM	BCl3 valve closed
5/3/2011	5:24:45 PM	PH3 valve closed
5/3/2011	5:24:45 PM	SiCl4 pre valve closed
5/3/2011	5:24:45 PM	SiCl4 post valve closed
5/3/2011	5:24:45 PM	Bubbler valve closed
5/3/2011	5:24:45 PM	Main Vac valve opened
5/3/2011	5:24:45 PM	Bypass valve opened
5/3/2011	5:24:45 PM	Helium MFC set to  0.000000
5/3/2011	5:24:45 PM	H2 MFC set to  0.000000
5/3/2011	5:24:45 PM	BCl3 MFC set to  0.000000
5/3/2011	5:24:45 PM	PHl3 MFC set to  0.000000
5/3/2011	5:24:45 PM	SiCl4 MFC set to  0.000000
5/3/2011	5:24:45 PM	Bypass solenoid MFC set to  0.000000
5/3/2011	5:24:45 PM	Tube furnace set to 0
5/3/2011	5:25:45 PM	H2 valve closed
5/3/2011	5:25:45 PM	BCl3 valve closed
5/3/2011	5:25:45 PM	PH3 valve closed
5/3/2011	5:25:45 PM	SiCl4 pre valve closed
5/3/2011	5:25:45 PM	SiCl4 post valve closed
5/3/2011	5:25:45 PM	Bubbler valve closed
5/3/2011	5:25:45 PM	Helium valve opened
5/3/2011	5:25:45 PM	Main Vac valve opened
5/3/2011	5:25:45 PM	Bypass valve opened
5/3/2011	5:25:45 PM	Helium MFC set to  100.000000
5/3/2011	5:25:45 PM	H2 MFC set to  0.000000
5/3/2011	5:25:45 PM	BCl3 MFC set to  0.000000
5/3/2011	5:25:45 PM	PHl3 MFC set to  0.000000
5/3/2011	5:25:45 PM	SiCl4 MFC set to  0.000000
5/3/2011	5:25:45 PM	Bypass solenoid MFC set to  0.000000
5/3/2011	5:25:45 PM	Tube furnace set to 0
5/3/2011	5:26:45 PM	Helium valve closed
5/3/2011	5:26:45 PM	H2 valve closed
5/3/2011	5:26:45 PM	BCl3 valve closed
5/3/2011	5:26:45 PM	PH3 valve closed
5/3/2011	5:26:45 PM	SiCl4 pre valve closed
5/3/2011	5:26:45 PM	SiCl4 post valve closed
5/3/2011	5:26:45 PM	Bubbler valve closed
5/3/2011	5:26:45 PM	Main Vac valve opened
5/3/2011	5:26:45 PM	Bypass valve opened
5/3/2011	5:26:45 PM	Helium MFC set to  0.000000
5/3/2011	5:26:45 PM	H2 MFC set to  0.000000
5/3/2011	5:26:45 PM	BCl3 MFC set to  0.000000
5/3/2011	5:26:45 PM	PHl3 MFC set to  0.000000
5/3/2011	5:26:45 PM	SiCl4 MFC set to  0.000000
5/3/2011	5:26:45 PM	Bypass solenoid MFC set to  0.000000
5/3/2011	5:26:45 PM	Tube furnace set to 0
5/3/2011	5:27:45 PM	H2 valve closed
5/3/2011	5:27:45 PM	BCl3 valve closed
5/3/2011	5:27:45 PM	PH3 valve closed
5/3/2011	5:27:45 PM	SiCl4 pre valve closed
5/3/2011	5:27:45 PM	SiCl4 post valve closed
5/3/2011	5:27:45 PM	Bubbler valve closed
5/3/2011	5:27:45 PM	Helium valve opened
5/3/2011	5:27:45 PM	Main Vac valve opened
5/3/2011	5:27:45 PM	Bypass valve opened
5/3/2011	5:27:45 PM	Helium MFC set to  100.000000
5/3/2011	5:27:45 PM	H2 MFC set to  0.000000
5/3/2011	5:27:45 PM	BCl3 MFC set to  0.000000
5/3/2011	5:27:45 PM	PHl3 MFC set to  0.000000
5/3/2011	5:27:45 PM	SiCl4 MFC set to  0.000000
5/3/2011	5:27:45 PM	Bypass solenoid MFC set to  0.000000
5/3/2011	5:27:45 PM	Tube furnace set to 0
5/3/2011	5:28:46 PM	Helium valve closed
5/3/2011	5:28:46 PM	H2 valve closed
5/3/2011	5:28:46 PM	BCl3 valve closed
5/3/2011	5:28:46 PM	PH3 valve closed
5/3/2011	5:28:46 PM	SiCl4 pre valve closed
5/3/2011	5:28:46 PM	SiCl4 post valve closed
5/3/2011	5:28:46 PM	Bubbler valve closed
5/3/2011	5:28:46 PM	Main Vac valve opened
5/3/2011	5:28:46 PM	Bypass valve opened
5/3/2011	5:28:46 PM	Helium MFC set to  0.000000
5/3/2011	5:28:46 PM	H2 MFC set to  0.000000
5/3/2011	5:28:46 PM	BCl3 MFC set to  0.000000
5/3/2011	5:28:46 PM	PHl3 MFC set to  0.000000
5/3/2011	5:28:46 PM	SiCl4 MFC set to  0.000000
5/3/2011	5:28:46 PM	Bypass solenoid MFC set to  0.000000
5/3/2011	5:28:46 PM	Tube furnace set to 0
5/3/2011	5:29:46 PM	H2 valve closed
5/3/2011	5:29:46 PM	BCl3 valve closed
5/3/2011	5:29:46 PM	PH3 valve closed
5/3/2011	5:29:46 PM	SiCl4 pre valve closed
5/3/2011	5:29:46 PM	SiCl4 post valve closed
5/3/2011	5:29:46 PM	Bubbler valve closed
5/3/2011	5:29:46 PM	Helium valve opened
5/3/2011	5:29:46 PM	Main Vac valve opened
5/3/2011	5:29:46 PM	Bypass valve opened
5/3/2011	5:29:46 PM	Helium MFC set to  100.000000
5/3/2011	5:29:46 PM	H2 MFC set to  0.000000
5/3/2011	5:29:46 PM	BCl3 MFC set to  0.000000
5/3/2011	5:29:46 PM	PHl3 MFC set to  0.000000
5/3/2011	5:29:46 PM	SiCl4 MFC set to  0.000000
5/3/2011	5:29:46 PM	Bypass solenoid MFC set to  0.000000
5/3/2011	5:29:46 PM	Tube furnace set to 0
5/3/2011	5:30:46 PM	Helium valve closed
5/3/2011	5:30:46 PM	H2 valve closed
5/3/2011	5:30:46 PM	BCl3 valve closed
5/3/2011	5:30:46 PM	PH3 valve closed
5/3/2011	5:30:46 PM	SiCl4 pre valve closed
5/3/2011	5:30:46 PM	SiCl4 post valve closed
5/3/2011	5:30:46 PM	Bubbler valve closed
5/3/2011	5:30:46 PM	Main Vac valve opened
5/3/2011	5:30:46 PM	Bypass valve opened
5/3/2011	5:30:46 PM	Helium MFC set to  0.000000
5/3/2011	5:30:46 PM	H2 MFC set to  0.000000
5/3/2011	5:30:46 PM	BCl3 MFC set to  0.000000
5/3/2011	5:30:46 PM	PHl3 MFC set to  0.000000
5/3/2011	5:30:46 PM	SiCl4 MFC set to  0.000000
5/3/2011	5:30:46 PM	Bypass solenoid MFC set to  0.000000
5/3/2011	5:30:46 PM	Tube furnace set to 0
5/3/2011	5:31:46 PM	H2 valve closed
5/3/2011	5:31:46 PM	BCl3 valve closed
5/3/2011	5:31:46 PM	PH3 valve closed
5/3/2011	5:31:46 PM	SiCl4 pre valve closed
5/3/2011	5:31:46 PM	SiCl4 post valve closed
5/3/2011	5:31:46 PM	Bubbler valve closed
5/3/2011	5:31:46 PM	Helium valve opened
5/3/2011	5:31:46 PM	Main Vac valve opened
5/3/2011	5:31:46 PM	Bypass valve opened
5/3/2011	5:31:46 PM	Helium MFC set to  100.000000
5/3/2011	5:31:46 PM	H2 MFC set to  0.000000
5/3/2011	5:31:46 PM	BCl3 MFC set to  0.000000
5/3/2011	5:31:46 PM	PHl3 MFC set to  0.000000
5/3/2011	5:31:46 PM	SiCl4 MFC set to  0.000000
5/3/2011	5:31:46 PM	Bypass solenoid MFC set to  0.000000
5/3/2011	5:31:46 PM	Tube furnace set to 0
5/3/2011	5:32:20 PM	Helium valve closed
5/3/2011	5:32:20 PM	H2 valve closed
5/3/2011	5:32:20 PM	BCl3 valve closed
5/3/2011	5:32:20 PM	PH3 valve closed
5/3/2011	5:32:20 PM	SiCl4 pre valve closed
5/3/2011	5:32:20 PM	SiCl4 post valve closed
5/3/2011	5:32:20 PM	Bubbler valve closed
5/3/2011	5:32:20 PM	Main Vac valve opened
5/3/2011	5:32:20 PM	Bypass valve opened
5/3/2011	5:32:20 PM	Helium MFC set to  0.000000
5/3/2011	5:32:20 PM	H2 MFC set to  0.000000
5/3/2011	5:32:20 PM	BCl3 MFC set to  0.000000
5/3/2011	5:32:20 PM	PHl3 MFC set to  0.000000
5/3/2011	5:32:20 PM	SiCl4 MFC set to  0.000000
5/3/2011	5:32:20 PM	Bypass solenoid MFC set to  0.000000
5/3/2011	5:32:20 PM	Tube furnace set to 0
5/3/2011	5:32:21 PM	H2 valve closed
5/3/2011	5:32:21 PM	BCl3 valve closed
5/3/2011	5:32:21 PM	PH3 valve closed
5/3/2011	5:32:21 PM	SiCl4 pre valve closed
5/3/2011	5:32:21 PM	SiCl4 post valve closed
5/3/2011	5:32:21 PM	Bubbler valve closed
5/3/2011	5:32:21 PM	Helium valve opened
5/3/2011	5:32:21 PM	Main Vac valve opened
5/3/2011	5:32:21 PM	Bypass valve opened
5/3/2011	5:32:21 PM	Helium MFC set to  100.000000
5/3/2011	5:32:21 PM	H2 MFC set to  0.000000
5/3/2011	5:32:21 PM	BCl3 MFC set to  0.000000
5/3/2011	5:32:21 PM	PHl3 MFC set to  0.000000
5/3/2011	5:32:21 PM	SiCl4 MFC set to  0.000000
5/3/2011	5:32:21 PM	Bypass solenoid MFC set to  0.000000
5/3/2011	5:32:21 PM	Tube furnace set to 0
5/3/2011	5:32:21 PM	Helium valve closed
5/3/2011	5:32:21 PM	H2 valve closed
5/3/2011	5:32:21 PM	BCl3 valve closed
5/3/2011	5:32:21 PM	PH3 valve closed
5/3/2011	5:32:21 PM	SiCl4 pre valve closed
5/3/2011	5:32:21 PM	SiCl4 post valve closed
5/3/2011	5:32:21 PM	Bubbler valve closed
5/3/2011	5:32:21 PM	Main Vac valve opened
5/3/2011	5:32:22 PM	Bypass valve opened
5/3/2011	5:32:22 PM	Helium MFC set to  0.000000
5/3/2011	5:32:22 PM	H2 MFC set to  0.000000
5/3/2011	5:32:22 PM	BCl3 MFC set to  0.000000
5/3/2011	5:32:22 PM	PHl3 MFC set to  0.000000
5/3/2011	5:32:22 PM	SiCl4 MFC set to  0.000000
5/3/2011	5:32:22 PM	Bypass solenoid MFC set to  0.000000
5/3/2011	5:32:22 PM	Tube furnace set to 0
5/3/2011	5:32:22 PM	H2 valve closed
5/3/2011	5:32:22 PM	BCl3 valve closed
5/3/2011	5:32:22 PM	PH3 valve closed
5/3/2011	5:32:22 PM	SiCl4 pre valve closed
5/3/2011	5:32:22 PM	SiCl4 post valve closed
5/3/2011	5:32:22 PM	Bubbler valve closed
5/3/2011	5:32:22 PM	Helium valve opened
5/3/2011	5:32:22 PM	Main Vac valve opened
5/3/2011	5:32:22 PM	Bypass valve opened
5/3/2011	5:32:22 PM	Helium MFC set to  100.000000
5/3/2011	5:32:22 PM	H2 MFC set to  0.000000
5/3/2011	5:32:22 PM	BCl3 MFC set to  0.000000
5/3/2011	5:32:22 PM	PHl3 MFC set to  0.000000
5/3/2011	5:32:22 PM	SiCl4 MFC set to  0.000000
5/3/2011	5:32:22 PM	Bypass solenoid MFC set to  0.000000
5/3/2011	5:32:23 PM	Tube furnace set to 0
5/3/2011	5:32:24 PM	Helium valve closed
5/3/2011	5:32:24 PM	H2 valve closed
5/3/2011	5:32:24 PM	BCl3 valve closed
5/3/2011	5:32:24 PM	PH3 valve closed
5/3/2011	5:32:24 PM	SiCl4 pre valve closed
5/3/2011	5:32:24 PM	SiCl4 post valve closed
5/3/2011	5:32:24 PM	Bubbler valve closed
5/3/2011	5:32:24 PM	Main Vac valve opened
5/3/2011	5:32:24 PM	Bypass valve opened
5/3/2011	5:32:24 PM	Helium MFC set to  0.000000
5/3/2011	5:32:24 PM	H2 MFC set to  0.000000
5/3/2011	5:32:24 PM	BCl3 MFC set to  0.000000
5/3/2011	5:32:24 PM	PHl3 MFC set to  0.000000
5/3/2011	5:32:24 PM	SiCl4 MFC set to  0.000000
5/3/2011	5:32:24 PM	Bypass solenoid MFC set to  0.000000
5/3/2011	5:32:24 PM	Tube furnace set to 0
5/3/2011	5:32:25 PM	H2 valve closed
5/3/2011	5:32:25 PM	BCl3 valve closed
5/3/2011	5:32:25 PM	PH3 valve closed
5/3/2011	5:32:25 PM	SiCl4 pre valve closed
5/3/2011	5:32:25 PM	SiCl4 post valve closed
5/3/2011	5:32:25 PM	Bubbler valve closed
5/3/2011	5:32:25 PM	Helium valve opened
5/3/2011	5:32:25 PM	Main Vac valve opened
5/3/2011	5:32:25 PM	Bypass valve opened
5/3/2011	5:32:25 PM	Helium MFC set to  100.000000
5/3/2011	5:32:25 PM	H2 MFC set to  0.000000
5/3/2011	5:32:25 PM	BCl3 MFC set to  0.000000
5/3/2011	5:32:25 PM	PHl3 MFC set to  0.000000
5/3/2011	5:32:25 PM	SiCl4 MFC set to  0.000000
5/3/2011	5:32:25 PM	Bypass solenoid MFC set to  0.000000
5/3/2011	5:32:25 PM	Tube furnace set to 0
5/3/2011	5:32:28 PM	Helium valve closed
5/3/2011	5:32:28 PM	H2 valve closed
5/3/2011	5:32:28 PM	BCl3 valve closed
5/3/2011	5:32:28 PM	PH3 valve closed
5/3/2011	5:32:28 PM	SiCl4 pre valve closed
5/3/2011	5:32:28 PM	SiCl4 post valve closed
5/3/2011	5:32:28 PM	Bubbler valve closed
5/3/2011	5:32:28 PM	Main Vac valve opened
5/3/2011	5:32:28 PM	Bypass valve opened
5/3/2011	5:32:28 PM	Helium MFC set to  0.000000
5/3/2011	5:32:28 PM	H2 MFC set to  0.000000
5/3/2011	5:32:28 PM	BCl3 MFC set to  0.000000
5/3/2011	5:32:28 PM	PHl3 MFC set to  0.000000
5/3/2011	5:32:28 PM	SiCl4 MFC set to  0.000000
5/3/2011	5:32:28 PM	Bypass solenoid MFC set to  0.000000
5/3/2011	5:32:28 PM	Tube furnace set to 0
5/3/2011	5:32:29 PM	H2 valve closed
5/3/2011	5:32:29 PM	BCl3 valve closed
5/3/2011	5:32:29 PM	PH3 valve closed
5/3/2011	5:32:29 PM	SiCl4 pre valve closed
5/3/2011	5:32:29 PM	SiCl4 post valve closed
5/3/2011	5:32:29 PM	Bubbler valve closed
5/3/2011	5:32:29 PM	Helium valve opened
5/3/2011	5:32:29 PM	Main Vac valve opened
5/3/2011	5:32:29 PM	Bypass valve opened
5/3/2011	5:32:29 PM	Helium MFC set to  100.000000
5/3/2011	5:32:29 PM	H2 MFC set to  0.000000
5/3/2011	5:32:29 PM	BCl3 MFC set to  0.000000
5/3/2011	5:32:29 PM	PHl3 MFC set to  0.000000
5/3/2011	5:32:29 PM	SiCl4 MFC set to  0.000000
5/3/2011	5:32:29 PM	Bypass solenoid MFC set to  0.000000
5/3/2011	5:32:29 PM	Tube furnace set to 0
5/3/2011	5:32:30 PM	Helium valve closed
5/3/2011	5:32:30 PM	H2 valve closed
5/3/2011	5:32:30 PM	BCl3 valve closed
5/3/2011	5:32:30 PM	PH3 valve closed
5/3/2011	5:32:30 PM	SiCl4 pre valve closed
5/3/2011	5:32:30 PM	SiCl4 post valve closed
5/3/2011	5:32:30 PM	Bubbler valve closed
5/3/2011	5:32:30 PM	Main Vac valve opened
5/3/2011	5:32:30 PM	Bypass valve opened
5/3/2011	5:32:30 PM	Helium MFC set to  0.000000
5/3/2011	5:32:30 PM	H2 MFC set to  0.000000
5/3/2011	5:32:30 PM	BCl3 MFC set to  0.000000
5/3/2011	5:32:30 PM	PHl3 MFC set to  0.000000
5/3/2011	5:32:30 PM	SiCl4 MFC set to  0.000000
5/3/2011	5:32:30 PM	Bypass solenoid MFC set to  0.000000
5/3/2011	5:32:30 PM	Tube furnace set to 0
5/3/2011	5:32:31 PM	Run finished at 5:32 PM
5/3/2011	5:32:31 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
5/3/2011	5:33:19 PM	Recipe started at 5:33 PM
5/3/2011	5:33:19 PM	Helium valve closed
5/3/2011	5:33:19 PM	BCl3 valve closed
5/3/2011	5:33:19 PM	PH3 valve closed
5/3/2011	5:33:19 PM	SiCl4 pre valve closed
5/3/2011	5:33:19 PM	SiCl4 post valve closed
5/3/2011	5:33:19 PM	Main Vac valve closed
5/3/2011	5:33:19 PM	Bypass valve closed
5/3/2011	5:33:19 PM	Bubbler valve closed
5/3/2011	5:33:19 PM	H2 valve opened
5/3/2011	5:33:19 PM	Helium MFC set to  0.000000
5/3/2011	5:33:19 PM	H2 MFC set to  500.000000
5/3/2011	5:33:19 PM	BCl3 MFC set to  0.000000
5/3/2011	5:33:19 PM	PHl3 MFC set to  0.000000
5/3/2011	5:33:20 PM	SiCl4 MFC set to  0.000000
5/3/2011	5:33:20 PM	Bypass solenoid MFC set to  0.000000
5/3/2011	5:33:20 PM	Tube furnace set to 0
5/3/2011	5:34:42 PM	Helium valve closed
5/3/2011	5:34:42 PM	BCl3 valve closed
5/3/2011	5:34:42 PM	PH3 valve closed
5/3/2011	5:34:42 PM	SiCl4 pre valve closed
5/3/2011	5:34:42 PM	SiCl4 post valve closed
5/3/2011	5:34:42 PM	Main Vac valve closed
5/3/2011	5:34:42 PM	Bypass valve closed
5/3/2011	5:34:42 PM	H2 valve opened
5/3/2011	5:34:42 PM	Bubbler valve opened
5/3/2011	5:34:42 PM	Helium MFC set to  0.000000
5/3/2011	5:34:42 PM	H2 MFC set to  500.000000
5/3/2011	5:34:42 PM	BCl3 MFC set to  0.000000
5/3/2011	5:34:42 PM	PHl3 MFC set to  0.000000
5/3/2011	5:34:42 PM	SiCl4 MFC set to  0.000000
5/3/2011	5:34:42 PM	Bypass solenoid MFC set to  0.000000
5/3/2011	5:34:43 PM	Tube furnace set to 1000
5/3/2011	5:54:43 PM	Helium valve closed
5/3/2011	5:54:43 PM	BCl3 valve closed
5/3/2011	5:54:43 PM	PH3 valve closed
5/3/2011	5:54:43 PM	Main Vac valve closed
5/3/2011	5:54:43 PM	Bypass valve closed
5/3/2011	5:54:43 PM	H2 valve opened
5/3/2011	5:54:43 PM	SiCl4 pre valve opened
5/3/2011	5:54:43 PM	SiCl4 post valve opened
5/3/2011	5:54:43 PM	Bubbler valve opened
5/3/2011	5:54:43 PM	Helium MFC set to  0.000000
5/3/2011	5:54:43 PM	H2 MFC set to  500.000000
5/3/2011	5:54:43 PM	BCl3 MFC set to  0.000000
5/3/2011	5:54:43 PM	PHl3 MFC set to  0.000000
5/3/2011	5:54:43 PM	SiCl4 MFC set to  90.000000
5/3/2011	5:54:43 PM	Bypass solenoid MFC set to  0.000000
5/3/2011	5:54:43 PM	Tube furnace set to 1000
5/3/2011	6:14:43 PM	Helium valve closed
5/3/2011	6:14:43 PM	BCl3 valve closed
5/3/2011	6:14:43 PM	PH3 valve closed
5/3/2011	6:14:43 PM	SiCl4 pre valve closed
5/3/2011	6:14:43 PM	SiCl4 post valve closed
5/3/2011	6:14:43 PM	Main Vac valve closed
5/3/2011	6:14:43 PM	Bypass valve closed
5/3/2011	6:14:43 PM	H2 valve opened
5/3/2011	6:14:43 PM	Bubbler valve opened
5/3/2011	6:14:43 PM	Helium MFC set to  0.000000
5/3/2011	6:14:43 PM	H2 MFC set to  500.000000
5/3/2011	6:14:43 PM	BCl3 MFC set to  0.000000
5/3/2011	6:14:43 PM	PHl3 MFC set to  0.000000
5/3/2011	6:14:43 PM	SiCl4 MFC set to  0.000000
5/3/2011	6:14:43 PM	Bypass solenoid MFC set to  0.000000
5/3/2011	6:14:43 PM	Tube furnace set to 0
5/3/2011	6:51:15 PM	H2 valve closed
5/3/2011	6:51:15 PM	BCl3 valve closed
5/3/2011	6:51:15 PM	PH3 valve closed
5/3/2011	6:51:15 PM	SiCl4 pre valve closed
5/3/2011	6:51:15 PM	SiCl4 post valve closed
5/3/2011	6:51:15 PM	Main Vac valve closed
5/3/2011	6:51:15 PM	Bypass valve closed
5/3/2011	6:51:15 PM	Helium valve opened
5/3/2011	6:51:15 PM	Bubbler valve opened
5/3/2011	6:51:15 PM	Helium MFC set to  500.000000
5/3/2011	6:51:15 PM	H2 MFC set to  0.000000
5/3/2011	6:51:15 PM	BCl3 MFC set to  0.000000
5/3/2011	6:51:15 PM	PHl3 MFC set to  0.000000
5/3/2011	6:51:15 PM	SiCl4 MFC set to  0.000000
5/3/2011	6:51:15 PM	Bypass solenoid MFC set to  0.000000
5/3/2011	6:51:16 PM	Tube furnace set to 0
5/3/2011	6:51:33 PM	Helium valve closed
5/3/2011	6:51:33 PM	H2 valve closed
5/3/2011	6:51:33 PM	BCl3 valve closed
5/3/2011	6:51:33 PM	PH3 valve closed
5/3/2011	6:51:33 PM	SiCl4 pre valve closed
5/3/2011	6:51:33 PM	SiCl4 post valve closed
5/3/2011	6:51:33 PM	Main Vac valve closed
5/3/2011	6:51:33 PM	Bypass valve closed
5/3/2011	6:51:33 PM	Bubbler valve closed
5/3/2011	6:51:33 PM	Helium MFC set to  0.000000
5/3/2011	6:51:33 PM	H2 MFC set to  0.000000
5/3/2011	6:51:33 PM	BCl3 MFC set to  0.000000
5/3/2011	6:51:33 PM	PHl3 MFC set to  0.000000
5/3/2011	6:51:33 PM	SiCl4 MFC set to  0.000000
5/3/2011	6:51:33 PM	Bypass solenoid MFC set to  0.000000
5/3/2011	6:51:33 PM	Tube furnace set to 0
5/3/2011	6:51:33 PM	Run finished at 6:51 PM
5/3/2011	6:54:06 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/3/2011	6:54:06 PM	Recipe started at 6:54 PM
5/3/2011	6:54:06 PM	Helium valve closed
5/3/2011	6:54:06 PM	H2 valve closed
5/3/2011	6:54:06 PM	BCl3 valve closed
5/3/2011	6:54:06 PM	PH3 valve closed
5/3/2011	6:54:06 PM	SiCl4 pre valve closed
5/3/2011	6:54:06 PM	SiCl4 post valve closed
5/3/2011	6:54:06 PM	Main Vac valve closed
5/3/2011	6:54:06 PM	Bubbler valve closed
5/3/2011	6:54:06 PM	Bypass valve opened
5/3/2011	6:54:06 PM	Helium MFC set to  0.000000
5/3/2011	6:54:06 PM	H2 MFC set to  0.000000
5/3/2011	6:54:06 PM	BCl3 MFC set to  0.000000
5/3/2011	6:54:06 PM	PHl3 MFC set to  0.000000
5/3/2011	6:54:06 PM	SiCl4 MFC set to  0.000000
5/3/2011	6:54:06 PM	Bypass solenoid MFC set to  0.000000
5/3/2011	6:54:06 PM	Tube furnace set to 0
5/3/2011	6:54:38 PM	Helium valve closed
5/3/2011	6:54:38 PM	H2 valve closed
5/3/2011	6:54:38 PM	BCl3 valve closed
5/3/2011	6:54:38 PM	PH3 valve closed
5/3/2011	6:54:38 PM	SiCl4 pre valve closed
5/3/2011	6:54:38 PM	SiCl4 post valve closed
5/3/2011	6:54:38 PM	Bubbler valve closed
5/3/2011	6:54:38 PM	Main Vac valve opened
5/3/2011	6:54:38 PM	Bypass valve opened
5/3/2011	6:54:38 PM	Helium MFC set to  0.000000
5/3/2011	6:54:38 PM	H2 MFC set to  0.000000
5/3/2011	6:54:38 PM	BCl3 MFC set to  0.000000
5/3/2011	6:54:38 PM	PHl3 MFC set to  0.000000
5/3/2011	6:54:38 PM	SiCl4 MFC set to  0.000000
5/3/2011	6:54:38 PM	Bypass solenoid MFC set to  0.000000
5/3/2011	6:54:38 PM	Tube furnace set to 0
5/3/2011	6:54:38 PM	Run finished at 6:54 PM
5/3/2011	6:54:38 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/3/2011	9:17:50 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/3/2011	9:17:51 PM	Recipe started at 9:17 PM
5/3/2011	9:17:51 PM	H2 valve closed
5/3/2011	9:17:51 PM	BCl3 valve closed
5/3/2011	9:17:51 PM	PH3 valve closed
5/3/2011	9:17:51 PM	SiCl4 pre valve closed
5/3/2011	9:17:51 PM	SiCl4 post valve closed
5/3/2011	9:17:51 PM	Main Vac valve closed
5/3/2011	9:17:51 PM	Bypass valve closed
5/3/2011	9:17:51 PM	Bubbler valve closed
5/3/2011	9:17:51 PM	Helium valve opened
5/3/2011	9:17:51 PM	Helium MFC set to  500.000000
5/3/2011	9:17:51 PM	H2 MFC set to  0.000000
5/3/2011	9:17:51 PM	BCl3 MFC set to  0.000000
5/3/2011	9:17:51 PM	PHl3 MFC set to  0.000000
5/3/2011	9:17:51 PM	SiCl4 MFC set to  0.000000
5/3/2011	9:17:51 PM	Bypass solenoid MFC set to  0.000000
5/3/2011	9:17:51 PM	Tube furnace set to 0
5/3/2011	9:19:12 PM	Helium valve closed
5/3/2011	9:19:12 PM	H2 valve closed
5/3/2011	9:19:12 PM	BCl3 valve closed
5/3/2011	9:19:12 PM	PH3 valve closed
5/3/2011	9:19:12 PM	SiCl4 pre valve closed
5/3/2011	9:19:12 PM	SiCl4 post valve closed
5/3/2011	9:19:12 PM	Main Vac valve closed
5/3/2011	9:19:12 PM	Bypass valve closed
5/3/2011	9:19:12 PM	Bubbler valve closed
5/3/2011	9:19:12 PM	Helium MFC set to  0.000000
5/3/2011	9:19:12 PM	H2 MFC set to  0.000000
5/3/2011	9:19:12 PM	BCl3 MFC set to  0.000000
5/3/2011	9:19:12 PM	PHl3 MFC set to  0.000000
5/3/2011	9:19:12 PM	SiCl4 MFC set to  0.000000
5/3/2011	9:19:12 PM	Bypass solenoid MFC set to  0.000000
5/3/2011	9:19:12 PM	Tube furnace set to 0
5/3/2011	9:19:12 PM	Run finished at 9:19 PM
5/3/2011	9:19:12 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/3/2011	9:28:51 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/3/2011	9:28:51 PM	Recipe started at 9:28 PM
5/3/2011	9:28:51 PM	Helium valve closed
5/3/2011	9:28:51 PM	H2 valve closed
5/3/2011	9:28:51 PM	BCl3 valve closed
5/3/2011	9:28:51 PM	PH3 valve closed
5/3/2011	9:28:51 PM	SiCl4 pre valve closed
5/3/2011	9:28:51 PM	SiCl4 post valve closed
5/3/2011	9:28:51 PM	Main Vac valve closed
5/3/2011	9:28:51 PM	Bubbler valve closed
5/3/2011	9:28:51 PM	Bypass valve opened
5/3/2011	9:28:51 PM	Helium MFC set to  0.000000
5/3/2011	9:28:51 PM	H2 MFC set to  0.000000
5/3/2011	9:28:51 PM	BCl3 MFC set to  0.000000
5/3/2011	9:28:51 PM	PHl3 MFC set to  0.000000
5/3/2011	9:28:51 PM	SiCl4 MFC set to  0.000000
5/3/2011	9:28:51 PM	Bypass solenoid MFC set to  0.000000
5/3/2011	9:28:51 PM	Tube furnace set to 0
5/3/2011	9:29:24 PM	Helium valve closed
5/3/2011	9:29:24 PM	H2 valve closed
5/3/2011	9:29:24 PM	BCl3 valve closed
5/3/2011	9:29:24 PM	PH3 valve closed
5/3/2011	9:29:24 PM	SiCl4 pre valve closed
5/3/2011	9:29:24 PM	SiCl4 post valve closed
5/3/2011	9:29:24 PM	Bubbler valve closed
5/3/2011	9:29:24 PM	Main Vac valve opened
5/3/2011	9:29:24 PM	Bypass valve opened
5/3/2011	9:29:24 PM	Helium MFC set to  0.000000
5/3/2011	9:29:24 PM	H2 MFC set to  0.000000
5/3/2011	9:29:24 PM	BCl3 MFC set to  0.000000
5/3/2011	9:29:24 PM	PHl3 MFC set to  0.000000
5/3/2011	9:29:24 PM	SiCl4 MFC set to  0.000000
5/3/2011	9:29:24 PM	Bypass solenoid MFC set to  0.000000
5/3/2011	9:29:24 PM	Tube furnace set to 0
5/3/2011	9:29:24 PM	Run finished at 9:29 PM
5/3/2011	9:29:24 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/3/2011	9:33:15 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/3/2011	9:33:16 PM	Recipe started at 9:33 PM
5/3/2011	9:33:16 PM	H2 valve closed
5/3/2011	9:33:16 PM	BCl3 valve closed
5/3/2011	9:33:16 PM	PH3 valve closed
5/3/2011	9:33:16 PM	SiCl4 pre valve closed
5/3/2011	9:33:16 PM	SiCl4 post valve closed
5/3/2011	9:33:16 PM	Main Vac valve closed
5/3/2011	9:33:16 PM	Bypass valve closed
5/3/2011	9:33:16 PM	Bubbler valve closed
5/3/2011	9:33:16 PM	Helium valve opened
5/3/2011	9:33:16 PM	Helium MFC set to  500.000000
5/3/2011	9:33:16 PM	H2 MFC set to  0.000000
5/3/2011	9:33:16 PM	BCl3 MFC set to  0.000000
5/3/2011	9:33:16 PM	PHl3 MFC set to  0.000000
5/3/2011	9:33:16 PM	SiCl4 MFC set to  0.000000
5/3/2011	9:33:16 PM	Bypass solenoid MFC set to  0.000000
5/3/2011	9:33:16 PM	Tube furnace set to 0
5/3/2011	9:33:21 PM	Run aborted at 9:33 PM
5/3/2011	9:33:21 PM	Helium valve closed
5/3/2011	9:33:21 PM	H2 valve closed
5/3/2011	9:33:21 PM	BCl3 valve closed
5/3/2011	9:33:21 PM	PH3 valve closed
5/3/2011	9:33:21 PM	SiCl4 pre valve closed
5/3/2011	9:33:21 PM	SiCl4 post valve closed
5/3/2011	9:33:21 PM	Bypass valve closed
5/3/2011	9:33:21 PM	Main Vac valve closed
5/3/2011	9:33:21 PM	Bubbler valve closed
5/3/2011	9:33:21 PM	Helium MFC set to  0.000000
5/3/2011	9:33:21 PM	H2 MFC set to  0.000000
5/3/2011	9:33:21 PM	BCl3 MFC set to  0.000000
5/3/2011	9:33:21 PM	PHl3 MFC set to  0.000000
5/3/2011	9:33:21 PM	SiCl4 MFC set to  0.000000
5/3/2011	9:33:21 PM	Tube furnace set to 0
5/3/2011	9:33:21 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/3/2011	9:33:55 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/3/2011	9:33:56 PM	Recipe started at 9:33 PM
5/3/2011	9:33:56 PM	Helium valve closed
5/3/2011	9:33:56 PM	H2 valve closed
5/3/2011	9:33:56 PM	BCl3 valve closed
5/3/2011	9:33:56 PM	PH3 valve closed
5/3/2011	9:33:56 PM	SiCl4 pre valve closed
5/3/2011	9:33:56 PM	SiCl4 post valve closed
5/3/2011	9:33:56 PM	Main Vac valve closed
5/3/2011	9:33:56 PM	Bubbler valve closed
5/3/2011	9:33:56 PM	Bypass valve opened
5/3/2011	9:33:56 PM	Helium MFC set to  0.000000
5/3/2011	9:33:56 PM	H2 MFC set to  0.000000
5/3/2011	9:33:56 PM	BCl3 MFC set to  0.000000
5/3/2011	9:33:56 PM	PHl3 MFC set to  0.000000
5/3/2011	9:33:56 PM	SiCl4 MFC set to  0.000000
5/3/2011	9:33:56 PM	Bypass solenoid MFC set to  0.000000
5/3/2011	9:33:56 PM	Tube furnace set to 0
5/3/2011	9:33:56 PM	Helium valve closed
5/3/2011	9:33:56 PM	H2 valve closed
5/3/2011	9:33:56 PM	BCl3 valve closed
5/3/2011	9:33:56 PM	PH3 valve closed
5/3/2011	9:33:56 PM	SiCl4 pre valve closed
5/3/2011	9:33:56 PM	SiCl4 post valve closed
5/3/2011	9:33:56 PM	Bubbler valve closed
5/3/2011	9:33:57 PM	Main Vac valve opened
5/3/2011	9:33:57 PM	Bypass valve opened
5/3/2011	9:33:57 PM	Helium MFC set to  0.000000
5/3/2011	9:33:57 PM	H2 MFC set to  0.000000
5/3/2011	9:33:57 PM	BCl3 MFC set to  0.000000
5/3/2011	9:33:57 PM	PHl3 MFC set to  0.000000
5/3/2011	9:33:57 PM	SiCl4 MFC set to  0.000000
5/3/2011	9:33:57 PM	Bypass solenoid MFC set to  0.000000
5/3/2011	9:33:57 PM	Tube furnace set to 0
5/3/2011	9:33:57 PM	Run finished at 9:33 PM
5/3/2011	9:33:57 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/3/2011	11:14:19 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/3/2011	11:14:20 PM	Recipe started at 11:14 PM
5/3/2011	11:14:20 PM	H2 valve closed
5/3/2011	11:14:20 PM	BCl3 valve closed
5/3/2011	11:14:20 PM	PH3 valve closed
5/3/2011	11:14:20 PM	SiCl4 pre valve closed
5/3/2011	11:14:20 PM	SiCl4 post valve closed
5/3/2011	11:14:20 PM	Main Vac valve closed
5/3/2011	11:14:20 PM	Bypass valve closed
5/3/2011	11:14:20 PM	Bubbler valve closed
5/3/2011	11:14:20 PM	Helium valve opened
5/3/2011	11:14:20 PM	Helium MFC set to  500.000000
5/3/2011	11:14:20 PM	H2 MFC set to  0.000000
5/3/2011	11:14:20 PM	BCl3 MFC set to  0.000000
5/3/2011	11:14:20 PM	PHl3 MFC set to  0.000000
5/3/2011	11:14:20 PM	SiCl4 MFC set to  0.000000
5/3/2011	11:14:20 PM	Bypass solenoid MFC set to  0.000000
5/3/2011	11:14:20 PM	Tube furnace set to 0
5/3/2011	11:15:40 PM	Helium valve closed
5/3/2011	11:15:40 PM	H2 valve closed
5/3/2011	11:15:40 PM	BCl3 valve closed
5/3/2011	11:15:40 PM	PH3 valve closed
5/3/2011	11:15:40 PM	SiCl4 pre valve closed
5/3/2011	11:15:40 PM	SiCl4 post valve closed
5/3/2011	11:15:40 PM	Main Vac valve closed
5/3/2011	11:15:40 PM	Bypass valve closed
5/3/2011	11:15:40 PM	Bubbler valve closed
5/3/2011	11:15:40 PM	Helium MFC set to  0.000000
5/3/2011	11:15:40 PM	H2 MFC set to  0.000000
5/3/2011	11:15:40 PM	BCl3 MFC set to  0.000000
5/3/2011	11:15:40 PM	PHl3 MFC set to  0.000000
5/3/2011	11:15:40 PM	SiCl4 MFC set to  0.000000
5/3/2011	11:15:40 PM	Bypass solenoid MFC set to  0.000000
5/3/2011	11:15:40 PM	Tube furnace set to 0
5/3/2011	11:15:40 PM	Run finished at 11:15 PM
5/3/2011	11:15:40 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/3/2011	11:19:35 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/3/2011	11:19:35 PM	Recipe started at 11:19 PM
5/3/2011	11:19:35 PM	Helium valve closed
5/3/2011	11:19:35 PM	H2 valve closed
5/3/2011	11:19:35 PM	BCl3 valve closed
5/3/2011	11:19:35 PM	PH3 valve closed
5/3/2011	11:19:35 PM	SiCl4 pre valve closed
5/3/2011	11:19:35 PM	SiCl4 post valve closed
5/3/2011	11:19:35 PM	Main Vac valve closed
5/3/2011	11:19:35 PM	Bubbler valve closed
5/3/2011	11:19:35 PM	Bypass valve opened
5/3/2011	11:19:35 PM	Helium MFC set to  0.000000
5/3/2011	11:19:35 PM	H2 MFC set to  0.000000
5/3/2011	11:19:35 PM	BCl3 MFC set to  0.000000
5/3/2011	11:19:35 PM	PHl3 MFC set to  0.000000
5/3/2011	11:19:35 PM	SiCl4 MFC set to  0.000000
5/3/2011	11:19:35 PM	Bypass solenoid MFC set to  0.000000
5/3/2011	11:19:35 PM	Tube furnace set to 0
5/3/2011	11:20:07 PM	Helium valve closed
5/3/2011	11:20:07 PM	H2 valve closed
5/3/2011	11:20:07 PM	BCl3 valve closed
5/3/2011	11:20:07 PM	PH3 valve closed
5/3/2011	11:20:07 PM	SiCl4 pre valve closed
5/3/2011	11:20:07 PM	SiCl4 post valve closed
5/3/2011	11:20:07 PM	Bubbler valve closed
5/3/2011	11:20:07 PM	Main Vac valve opened
5/3/2011	11:20:07 PM	Bypass valve opened
5/3/2011	11:20:07 PM	Helium MFC set to  0.000000
5/3/2011	11:20:07 PM	H2 MFC set to  0.000000
5/3/2011	11:20:07 PM	BCl3 MFC set to  0.000000
5/3/2011	11:20:07 PM	PHl3 MFC set to  0.000000
5/3/2011	11:20:07 PM	SiCl4 MFC set to  0.000000
5/3/2011	11:20:07 PM	Bypass solenoid MFC set to  0.000000
5/3/2011	11:20:07 PM	Tube furnace set to 0
5/3/2011	11:20:08 PM	Run finished at 11:20 PM
5/3/2011	11:20:08 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/3/2011	11:24:31 PM	Program started after a nonstandard shutdown
5/3/2011	11:24:31 PM	Helium valve closed
5/3/2011	11:24:31 PM	H2 valve closed
5/3/2011	11:24:31 PM	BCl3 valve closed
5/3/2011	11:24:31 PM	PH3 valve closed
5/3/2011	11:24:31 PM	SiCl4 pre valve closed
5/3/2011	11:24:31 PM	SiCl4 post valve closed
5/3/2011	11:24:31 PM	Main Vac valve closed
5/3/2011	11:24:31 PM	Bypass valve closed
5/3/2011	11:24:31 PM	Bubbler valve closed
5/3/2011	11:24:31 PM	Helium MFC set to  0.000000
5/3/2011	11:24:31 PM	H2 MFC set to  0.000000
5/3/2011	11:24:31 PM	BCl3 MFC set to  0.000000
5/3/2011	11:24:31 PM	PHl3 MFC set to  0.000000
5/3/2011	11:24:31 PM	SiCl4 MFC set to  0.000000
5/3/2011	11:24:31 PM	Bypass solenoid MFC set to  760.000000
5/3/2011	11:24:32 PM	Tube furnace set to 0
5/3/2011	11:28:26 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/3/2011	11:28:26 PM	Recipe started at 11:28 PM
5/3/2011	11:28:27 PM	Helium valve closed
5/3/2011	11:28:27 PM	H2 valve closed
5/3/2011	11:28:27 PM	BCl3 valve closed
5/3/2011	11:28:27 PM	PH3 valve closed
5/3/2011	11:28:27 PM	SiCl4 pre valve closed
5/3/2011	11:28:27 PM	SiCl4 post valve closed
5/3/2011	11:28:27 PM	Main Vac valve closed
5/3/2011	11:28:27 PM	Bubbler valve closed
5/3/2011	11:28:27 PM	Bypass valve opened
5/3/2011	11:28:27 PM	Helium MFC set to  0.000000
5/3/2011	11:28:27 PM	H2 MFC set to  0.000000
5/3/2011	11:28:27 PM	BCl3 MFC set to  0.000000
5/3/2011	11:28:27 PM	PHl3 MFC set to  0.000000
5/3/2011	11:28:27 PM	SiCl4 MFC set to  0.000000
5/3/2011	11:28:27 PM	Bypass solenoid MFC set to  0.000000
5/3/2011	11:28:27 PM	Tube furnace set to 0
5/3/2011	11:28:27 PM	Helium valve closed
5/3/2011	11:28:27 PM	H2 valve closed
5/3/2011	11:28:27 PM	BCl3 valve closed
5/3/2011	11:28:27 PM	PH3 valve closed
5/3/2011	11:28:27 PM	SiCl4 pre valve closed
5/3/2011	11:28:27 PM	SiCl4 post valve closed
5/3/2011	11:28:27 PM	Bubbler valve closed
5/3/2011	11:28:27 PM	Main Vac valve opened
5/3/2011	11:28:27 PM	Bypass valve opened
5/3/2011	11:28:27 PM	Helium MFC set to  0.000000
5/3/2011	11:28:27 PM	H2 MFC set to  0.000000
5/3/2011	11:28:27 PM	BCl3 MFC set to  0.000000
5/3/2011	11:28:27 PM	PHl3 MFC set to  0.000000
5/3/2011	11:28:27 PM	SiCl4 MFC set to  0.000000
5/3/2011	11:28:27 PM	Bypass solenoid MFC set to  0.000000
5/3/2011	11:28:27 PM	Tube furnace set to 0
5/3/2011	11:28:27 PM	Run finished at 11:28 PM
5/3/2011	11:28:27 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/3/2011	11:29:51 PM	Recipe started at 11:29 PM
5/3/2011	11:29:51 PM	BCl3 valve closed
5/3/2011	11:29:51 PM	PH3 valve closed
5/3/2011	11:29:51 PM	SiCl4 pre valve closed
5/3/2011	11:29:51 PM	SiCl4 post valve closed
5/3/2011	11:29:51 PM	Main Vac valve closed
5/3/2011	11:29:51 PM	Bypass valve closed
5/3/2011	11:29:51 PM	Bubbler valve closed
5/3/2011	11:29:51 PM	Helium valve opened
5/3/2011	11:29:51 PM	H2 valve opened
5/3/2011	11:29:51 PM	Helium MFC set to  190.000000
5/3/2011	11:29:51 PM	H2 MFC set to  10.000000
5/3/2011	11:29:51 PM	BCl3 MFC set to  0.000000
5/3/2011	11:29:51 PM	PHl3 MFC set to  0.000000
5/3/2011	11:29:51 PM	SiCl4 MFC set to  0.000000
5/3/2011	11:29:51 PM	Bypass solenoid MFC set to  0.000000
5/3/2011	11:29:51 PM	Tube furnace set to 0
5/3/2011	11:33:15 PM	BCl3 valve closed
5/3/2011	11:33:15 PM	PH3 valve closed
5/3/2011	11:33:15 PM	SiCl4 pre valve closed
5/3/2011	11:33:15 PM	SiCl4 post valve closed
5/3/2011	11:33:15 PM	Main Vac valve closed
5/3/2011	11:33:15 PM	Bypass valve closed
5/3/2011	11:33:15 PM	Helium valve opened
5/3/2011	11:33:15 PM	H2 valve opened
5/3/2011	11:33:15 PM	Bubbler valve opened
5/3/2011	11:33:15 PM	Helium MFC set to  47.500000
5/3/2011	11:33:15 PM	H2 MFC set to  2.500000
5/3/2011	11:33:15 PM	BCl3 MFC set to  0.000000
5/3/2011	11:33:15 PM	PHl3 MFC set to  0.000000
5/3/2011	11:33:15 PM	SiCl4 MFC set to  0.000000
5/3/2011	11:33:15 PM	Bypass solenoid MFC set to  0.000000
5/3/2011	11:33:15 PM	Tube furnace set to 350
